Ibiranga irangi rya magnetron sputtering Igice cya 2

Ibiranga irangi rya magnetron sputtering

(3) Ingufu nke ziterwa n'amashanyarazi. Bitewe n'uko ingufu za cathode ari nkeya zikoreshwa ku ntego, plasma ihambirwa n'imbaraga rukuruzi ziri hafi ya cathode, bityo ikabuza uduce dufite ingufu nyinshi ku ruhande rw'ubutaka abantu barashe. Kubwibyo, urwego rw'ibyangiritse kuri substrate nk'ibikoresho bya semiconductor biterwa no guterwa kw'uduce dufite ingufu ni ruto ugereranyije n'ubundi buryo bwo guterwa.

(4) Ubushyuhe buri hasi. Igipimo cyo gusohora amashanyarazi hakoreshejwe magnetron kiri hejuru, kuko intego ya cathode mu ngufu za rukuruzi ziri mu karere, ni ukuvuga inzira yo gusohora amashanyarazi mu gace gato k’aho electron iri hejuru, mu gihe ingaruka za rukuruzi ziri hanze y’akarere, cyane cyane kure y’imbaraga za rukuruzi z’ubuso bwa substrate hafi aho, ingano ya electron iterwa no gukwirakwira kw’amazi yo hasi cyane, ndetse ishobora no kuba iri hasi ugereranyije n’ikwirakwira rya dipole (kubera itandukaniro riri hagati y’umuvuduko wa gaze ebyiri zikora ku rugero runaka). Kubwibyo, mu bihe byo gusohora amashanyarazi hakoreshejwe magnetron, ingano ya electron zitera hejuru y’ubuso bwa substrate iri hasi cyane ugereranyije n’iy’ikwirakwira rya diode risanzwe, kandi kwiyongera gukabije k’ubushyuhe kuri substrate birindwa kubera kugabanuka k’umubare wa electron zitera hejuru y’ubuso. Byongeye kandi, mu buryo bwo gusohora amashanyarazi hakoreshejwe magnetron, anode y'igikoresho cyo gusohora amashanyarazi hakoreshejwe magnetron ishobora kuba iherereye hafi ya cathode, kandi icyo gikoresho gishobora no gukurwamo ubutaka no mu bushobozi bwo gusunika, ku buryo electron zishobora kutanyura mu gikoresho cyo gusohora amashanyarazi gishingiye ku butaka ngo zinyure muri anode, bityo electron zifite ingufu nyinshi zitera substrate zipfundikiye zigabanuka, bigabanya ukwiyongera k'ubushyuhe buterwa na electron, kandi bigabanya cyane uburyo electron ya kabiri itera substrate igatera ubushyuhe.

(5) Gukata ku buryo butangana ku ntego. Mu buryo busanzwe bwo gukata ku ngufu za magnetron, gukoresha imbaraga za rukuruzi zitangana, bityo plasma ikazatanga ingaruka zo guhuza ibintu, bizatuma intego iri ku mwanya w’aho igipimo cyo gukata ku ngufu cyaba cyiza cyane, ingaruka ni uko intego izatanga igipimo kitangana ku buryo bugaragara. Igipimo cyo gukoresha intego muri rusange ni hafi 30%. Kugira ngo wongere igipimo cyo gukoresha ibikoresho by’ingenzi, ushobora gufata ingamba zitandukanye zo kunoza, nko kunoza imiterere n’ikwirakwizwa ry’imbaraga za rukuruzi, kugira ngo rukuruzi iri ku ntego ifate inzira y’imbere n’ibindi.

Ingorane mu gukoresha imbaraga za rukuruzi. Iyo intego yo gukoresha rukuruzi ikozwe mu bikoresho bifite ubushobozi bwo gukoresha rukuruzi bwinshi, imbaraga za rukuruzi zizanyura imbere mu gice cy’ingenzi kugira ngo habeho uburyo bwo gukoresha rukuruzi bugufi, bityo bigatuma gusohora ingufu za rukuruzi bigorana. Kugira ngo hakorwe ingufu za rukuruzi zo mu kirere, abantu bakoze ubushakashatsi butandukanye, urugero, kugira ngo buzuze imbaraga za rukuruzi ziri mu bikoresho by’ingenzi, hagasigara icyuho kinini mu ntego kugira ngo habeho kwiyongera kw’ubushyuhe bwa rukuruzi, cyangwa kugabanya ubushobozi bwa rukuruzi bwo gukoresha rukuruzi mu bikoresho by’ingenzi.

–Iyi nkuru yasohotse nauruganda rukora imashini zikora imashini zikoresha umwuka ushyushyeGuangdong Zhenhua