Astaamaha daahan magnetron sputtering cutubka 2

Astaamaha dahaarka sputtering magnetron

(3) Tamar hooseysa. Sababtoo ah korantada cathode-ka hooseeya ee lagu dabaqo bartilmaameedka, balaasmadu waxay ku xiran tahay goobta magnetic ee booska u dhow cathode, sidaas darteed waxay joojinaysaa qaybaha tamarta sare ee dhinaca dhinaca substrate-ka ee dadku toogtay. Sidaa darteed, heerka dhaawaca soo gaadhay substrate-ka sida aaladaha semiconductor-ka ee ay sababto bambaanooyinka walxaha qarxa ayaa ka hooseeya kan ay sababaan hababka kale ee xafida.

(4) Heerkulka substrate hoose. Heerka qulqulka qulqulaya ee Magnetron waa mid sarreeya, sababtoo ah bartilmaameedka cathode ee goobta magnetic gudaha gobolka, taas oo ah, dariiqa qulqulka bartilmaameedka ee ku dhex jira aag yar oo kooban oo ka mid ah fiirsashada elektaroonigga ah ayaa sarreeya, halka saameynta magnetic ee ka baxsan gobolka, gaar ahaan ka fogaanta magnetic ee dusha sare ee u dhow, feejignaanta elektarooniga ah sababtoo ah kala firdhinta kuwa aad uga hooseeya, iyo xitaa laga yaabaa inay ka hooseeyaan cadaadiska shaqada oo kala sarreeya). Sidaa darteed, marka la eego xaaladaha ku dhufashada magnetron, xoojinta elektaroonigga duqeymaha dusha sare ee substrate aad ayuu uga hooseeyaa midka caadiga ah ee diode-ka caadiga ah, iyo kororka xad-dhaafka ah ee heerkulka substrate waa la iska ilaaliyaa sababtoo ah hoos u dhaca tirada dhacdooyinka elektaroonigga ah ee substrate-ka. Intaa waxaa dheer, habka xajinta magnetron, anode ee qalabka magnetron wuxuu ku yaalaa agagaarka agagaarka cathode, iyo haystaha substrate sidoo kale wuxuu noqon karaa mid aan dhulka lahayn oo ku jira awoodda ganaaxa, si elektaroonada aysan u dhaafin qalabka wax lagu dhejiyo oo ay ku qulqulaan anode, taas oo ka dhigaysa tamar sare oo tamar ah oo hoos u dhigaysa bamka korontada iyo in si weyn loo yareeyo bamka elektaroonigga sare ee substrate-ka taasoo keentay kulaylka.

(5) Beegsiga aan sinnayn ee bartilmaameedka. In bartilmaameedka sputtering magnetron dhaqameed, isticmaalka garoonka magnetic sinnayn, si Plasma soo saari doonaa saamayn isku xidhka maxaliga ah, ka dhigi doonaa bartilmaameedka on booska maxaliga ah ee heerka etching ah oo aad u weyn, natiijadu waa in bartilmaameedku soo saari doonaa sinnaan sinnayn weyn. Heerka ka faa'iidaysiga bartilmaameedku guud ahaan waa ilaa 30%. Si loo hagaajiyo heerka isticmaalka walxaha bartilmaameedka ah, waxaad qaadi kartaa tallaabooyin kala duwan oo hagaajin ah, sida hagaajinta qaabka iyo qaybinta goobta magnetic, si magnet-ka ee bartilmaameedka cathode ee dhaqdhaqaaqa gudaha iyo wixii la mid ah.

Ku adagtahay in la daadiyo bartilmaameedyada walxaha magnetic. Haddii bartilmaameedka sputtering uu ka samaysan yahay shay leh birlab sare oo birlab ah, xadhkaha magnetic ee xoogga ayaa si toos ah u dhex mari doona gudaha bartilmaameedka si ay u dhacdo dhacdo gaaban oo gaaban, sidaas awgeed dheecaanka magnetronku waa mid adag. Si loo abuuro goobta magnetic space, dadku waxay sameeyeen daraasado kala duwan, tusaale ahaan, si ay u buuxiyaan duurka magnetic gudaha walxaha bartilmaameedka, iyagoo ka tagaya nusqaamo badan oo bartilmaameedka ah si kor loogu qaado jiilka qulqulka badan ee heerkulka bartilmaameedka magnetic, ama si loo yareeyo qulqulka magnetic ee walxaha bartilmaameedka.

–Maqaalkan waxa soo saaraysoo saaraha mashiinka daahan vacuumGuangdong Zhenhua