Ibiranga magnetron sputtering coating Igice cya 2

Ibiranga magnetron sputtering coating

(3) Ingufu nke zisohoka. Bitewe n’umuvuduko muke wa cathode ukoreshwa ku ntego, plasma ihambirwa n’umurima wa magneti mu mwanya uri hafi ya cathode, bityo bikabuza uduce duto duto twinshi twinshi kuruhande rwabantu barashe. Kubwibyo, urugero rwibyangiritse kuri substrate nkibikoresho bya semiconductor biterwa no guterwa ibisasu byatewe ni bike ugereranije nubundi buryo bwo gusuka.

(4) Ubushyuhe buke. Umuvuduko ukabije wa Magnetron ni mwinshi, kubera ko intego ya cathode mu murima wa magneti mu karere, ni ukuvuga ko inzira yo gusohora intego mu gace gato kegereye akarere ka elegitoronike ari hejuru, mu gihe mu ngaruka za rukuruzi hanze y’akarere, cyane cyane kure y’umurego wa rukuruzi w’ubutaka bwa substrate hafi, cyane cyane kuri electron bitewe no gukwirakwiza umuvuduko ukabije wa dipole. Kubwibyo, mugihe ibintu bya magnetron bigenda byiyongera, kwibumbira hamwe kwa electroni gutera ibisasu hejuru yubutaka ni munsi cyane ugereranije no gusohora diode isanzwe, kandi hirindwa kwiyongera gukabije kwubushyuhe bwa substrate bitewe no kugabanuka kwumubare wa electron kuri substrate. Byongeye kandi, muburyo bwo gusunika magnetron, anode yigikoresho cya magnetron gishobora gusakara hafi ya cathode, kandi uwifata substrate ashobora kandi kuba adafite aho ahuriye no mubushobozi bwo guhagarikwa, kugirango electron zidashobora kunyura mubutaka bwa substrate kandi zigatembera muri anode, bityo bigatuma electrone zifite ingufu nyinshi zitera ingufu za elegitoronike zigabanya amashanyarazi. icya kabiri cya electron bombardment ya substrate bivamo kubyara ubushyuhe.

(5) Kuringaniza kuringaniza intego. Mubisanzwe gakondo ya magnetron isuka, ikoreshwa ryumurima wa magneti utaringaniye, plasma rero izatanga ingaruka zaho zihuza, bizatuma intego kumwanya waho igipimo cyimyanya ndangagitsina ari kinini, igisubizo nuko intego izatanga umusaruro ushimishije. Igipimo cyo gukoresha intego muri rusange ni 30%. Kugirango uzamure igipimo cyimikoreshereze yibikoresho bigenewe, urashobora gufata ingamba zitandukanye zo kunoza, nko kunoza imiterere nogukwirakwiza umurima wa magneti, kugirango magnet muri cathode yimbere yimbere nibindi.

Ingorane zo gusohora ibintu bya magneti. Niba intego yo gusohora ikozwe mubintu bifite imbaraga za magneti nyinshi, imirongo ya magneti yingufu izanyura imbere yimbere yintego kugirango habeho ibintu bigufi bya rukuruzi, bityo bigatuma magnetron isohoka bigoye. Kugirango habeho umwanya wa magnetiki yumwanya, abantu bakoze ubushakashatsi butandukanye, kurugero, kugirango buzuze umurima wa magneti imbere mubikoresho bigenewe, hasigara icyuho kinini mumigambi kugirango uteze imbere kubyara ibintu byinshi bitemba ubushyuhe bwa magneti bwiyongera, cyangwa kugabanya imbaraga za rukuruzi yibikoresho bigenewe.

–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua