Mfundo yokutira vacuum evaporation
1, Zida ndi thupi ndondomeko vakuyumu evaporation ❖ kuyanika
Zida zokutira za vacuum evaporation nthawi zambiri zimakhala ndi chipinda cha vacuum ndi njira yotulutsiramo. Mkati mwa vacuum chipinda, pali evaporation source (ie evaporation chotenthetsera), gawo lapansi ndi gawo lapansi chimango, gawo lapansi chotenthetsera heater, utsi dongosolo, etc.
Zinthu zokutira zimayikidwa mu gwero la evaporation la chipinda chopukusira, ndipo pansi pa mikhalidwe ya vacuum yapamwamba, imatenthedwa ndi gwero la evaporation kuti lisungunuke. Pamene pafupifupi ufulu osiyanasiyana mamolekyu nthunzi ndi lalikulu kuposa liniya kukula kwa chipinda vakuyuyumu, pambuyo maatomu ndi mamolekyu a nthunzi filimu nthunzi anathawa pamwamba pa gwero evaporation, kawirikawiri m'mbuyo ndi kugunda kwa mamolekyu ena kapena maatomu, ndi mwachindunji kufika pamwamba pa gawo lapansi kuti yokutidwa. Chifukwa cha kutentha kwa gawo lapansi, tinthu tating'onoting'ono ta filimu timapanga filimuyo.
Pofuna kupititsa patsogolo kumamatira kwa mamolekyu a evaporation ndi gawo lapansi, gawo lapansili limatha kuyendetsedwa ndi kutentha koyenera kapena kuyeretsa ayoni. Kupaka mpweya wa vacuum kumadutsa m'njira zotsatirazi kuchokera ku nthunzi, kusuntha kupita ku filimu.
(1) Kugwiritsa ntchito njira zosiyanasiyana kutembenuza mitundu ina ya mphamvu mu mphamvu matenthedwe, zinthu filimu ndi usavutike mtima kuti asamasanduke nthunzi kapena sublimate mu mpweya particles (maatomu, mamolekyu kapena masango atomiki) ndi kuchuluka kwa mphamvu (0,1 kuti 0,3 eV).
(2) Gasi particles amachoka pamwamba pa filimuyo ndipo amatumizidwa pamwamba pa gawo lapansi pa liwiro linalake la kuyenda, makamaka popanda kugunda, molunjika.
(3) The mpweya particles kufika pamwamba pa gawo lapansi coalesce ndi nucleate, ndiyeno amakula kukhala olimba gawo filimu.
(4) Kukonzanso kapena kugwirizanitsa mankhwala kwa maatomu omwe amapanga filimuyo.
2, Kutentha kwa evaporation
(1) Kukana kutentha kwa mpweya
Kukana Kutenthetsa evaporation ndi njira yosavuta komanso yogwiritsidwa ntchito kwambiri yotenthetsera, yomwe imagwiritsidwa ntchito popaka zida ndi malo osungunuka pansi pa 1500 ℃, zitsulo zazikulu zosungunuka mu waya kapena mawonekedwe a pepala (W, Mo, Ti, Ta, boron nitride, etc.) nthawi zambiri amapangidwa kukhala mawonekedwe abwino a gwero la evaporation, odzaza ndi zinthu zosungunulira ku kutentha kwapang'onopang'ono, kudzera mumtambo waposachedwa wa Jolou. plating zakuthupi, mawonekedwe a evaporation gwero makamaka zikuphatikizapo Mipikisano strand ozungulira, U woboola pakati, sine yoweyula, mbale woonda, bwato, cone dengu, etc. Pa nthawi yomweyo, njira amafuna evaporation gwero zakuthupi kukhala mkulu kusungunuka mfundo, otsika machulukitsidwe nthunzi kuthamanga, khola mankhwala katundu, alibe mankhwala anachita ndi ❖ kuyanika zakuthupi pa kutentha kwakukulu, kusintha kwa kutentha kwakukulu, kusintha kwa kutentha kwakukulu, kutentha kwa kutentha, kutentha kwakukulu, kutentha kwa kutentha, kutentha kwapamwamba, kutentha kwa kutentha, kutentha pang'ono, kutentha kwa kutentha, etc. gwero kuti atenthe ndi nthunzi za filimuyo ndi Kutenthetsa mwachindunji, kapena kuika filimu zinthu mu crucible zopangidwa graphite ndi zina kutentha kugonjetsedwa ndi oxides zitsulo (monga A202, B0) ndi zipangizo zina Kutentha ina yachilendo kuti asamasanduke nthunzi.
Kukaniza kutentha kwa evaporation ❖ kuyanika kuli ndi malire: zitsulo zosakanizika zimakhala ndi mphamvu yochepa ya nthunzi, yomwe imakhala yovuta kupanga filimu yopyapyala; zinthu zina ndizosavuta kupanga aloyi ndi waya wotentha; sikophweka kupeza yunifolomu zikuchokera filimu aloyi. Chifukwa cha mawonekedwe osavuta, mtengo wotsika komanso kugwiritsa ntchito kosavuta kwa njira yowotcha yamadzimadzi, ndi njira yofala kwambiri yopangira evaporation.
(2) Kutentha kwa mtengo wa ma elekitironi
Electron beam evaporation ndi njira yopangira nthunzi zinthu zokutira poziphulitsa ndi chitsulo champhamvu champhamvu cha elekitironi pochiyika mu crucible yamkuwa yoziziritsidwa ndi madzi. Gwero la evaporation limapangidwa ndi gwero lotulutsa ma elekitironi, gwero lamphamvu la electron mathamangitsidwe mphamvu, crucible (kawirikawiri mkuwa crucible) , maginito coil, ndi kuzirala madzi anapereka, etc. Mu chipangizo ichi, zinthu kutentha amayikidwa mu madzi utakhazikika crucible, ndi electron mtengo bomba amaphulitsa zinthu zochepa kwambiri pansi pa kutentha otsika kwambiri, pamene gawo laling'ono kwambiri la kutentha kwatsala pang'ono kutentha. crucible, yomwe imatha kuonedwa ngati gawo lophulitsidwa la crucible. Chifukwa chake, njira yotenthetsera mtengo wa ma elekitironi kuti ikhale evaporation ingapewe kuipitsidwa pakati pa zinthu zokutira ndi zinthu zomwe zimatuluka.
Mapangidwe a gwero la evaporation la ma elekitironi amatha kugawidwa m'mitundu itatu: mfuti zowongoka (mfuti za Boules), mfuti za mphete (zopatuka pamagetsi) ndi mfuti za e-mfuti (zopatuka mwamaginito). Chidutswa chimodzi kapena zingapo zitha kuyikidwa pamalo opangira mpweya, omwe amatha kuwuluka ndikuyika zinthu zosiyanasiyana nthawi imodzi kapena padera.
Magwero a electron evaporation ali ndi ubwino wotsatira.
①Kuchulukirachulukira kwakukulu kwa gwero la electron beam bombardment evaporation kumatha kupeza mphamvu yochulukirapo kuposa gwero lotenthetsera, lomwe limatha kutulutsa zinthu zomwe zimasungunuka kwambiri, monga W, Mo, Al2O3, ndi zina.
②Zinthu zokutira zimayikidwa mu crucible yamkuwa yokhazikika ndi madzi, yomwe ingapewe kutulutsa mpweya wa zinthu zomwe zimatuluka, komanso zomwe zimachitika pakati pawo.
③Kutentha kumatha kuwonjezeredwa pamwamba pa zinthu zokutira, zomwe zimapangitsa kuti kutentha kukhale kokwera komanso kutayika kwa ma conduction a kutentha ndi ma radiation ochepa.
The sangathe la elekitironi mtengo Kutentha evaporation njira ndi kuti ma elekitironi pulayimale ku electron mfuti ndi ma elekitironi yachiwiri kuchokera pamwamba pa ❖ kuyanika zakuthupi adzakhala ionize maatomu evaporating ndi mamolekyu otsalira mpweya, zomwe zimakhudza khalidwe la filimu nthawi zina.
(3) Kutentha kwapang'onopang'ono kwapang'onopang'ono
Kutentha kwapang'onopang'ono kwapang'onopang'ono ndikuyika crucible ndi zinthu zokutira pakati pa koyilo yozungulira kwambiri, kuti zinthu zokutira zipange eddy pakali pano komanso hysteresis effect poyambitsa gawo la ma elekitiromu amagetsi apamwamba kwambiri, zomwe zimapangitsa kuti filimuyo isatenthe mpaka iphwanyike ndikuwuka. Gwero la evaporation nthawi zambiri limakhala ndi koyilo yokhazikika yamadzi yokhazikika komanso graphite kapena ceramic (magnesium oxide, aluminium oxide, boron oxide, etc.) crucible. Mphamvu yamagetsi yamagetsi imagwiritsa ntchito mafupipafupi 10,000 mpaka mazana angapo Hz, mphamvu yolowera ndi ma kilowatts angapo mpaka mazana angapo, kucheperako kwa zinthu za nembanemba, kukwezeka kwafupipafupi. Mafupipafupi a coil coil nthawi zambiri amapangidwa ndi chubu chamkuwa chokhazikika ndi madzi.
Kuipa kwa njira yotenthetsera kutentha kwapamwamba kwambiri ndikuti sikophweka kuwongolera mphamvu yolowera, ili ndi zotsatirazi.
①Kuchuluka kwa evaporation
②Kutentha kwa gwero la evaporation kumakhala kofanana komanso kosasunthika, kotero sikophweka kutulutsa chodabwitsa cha madontho opaka utoto, komanso kutha kupewa zochitika za pinholes pafilimu yoyikidwa.
③Magwero a nthunzi amakwezedwa kamodzi, ndipo kutentha kumakhala kosavuta komanso kosavuta kuwongolera.
Nthawi yotumiza: Oct-28-2022