Makhalidwe a magnetron sputtering coating Chapter 2

Makhalidwe a zokutira za magnetron sputtering

(3) Kutsika kwamphamvu kwamphamvu. Chifukwa cha otsika cathode voteji ntchito chandamale, plasma ndi womangidwa ndi maginito mu danga pafupi ndi cathode, motero kuletsa mkulu-mphamvu mlandu particles kumbali ya gawo lapansi anthu kuwombera. Choncho, kuchuluka kwa kuwonongeka kwa gawo lapansi monga zida za semiconductor zomwe zimayambitsidwa ndi bombardment ya tinthu tating'onoting'ono ndizochepa kuposa zomwe zimayambitsidwa ndi njira zina zolavula.

(4) Kutentha kwa gawo lapansi. Magnetron sputtering sputtering mlingo ndi mkulu, chifukwa cathode chandamale mu mphamvu maginito m'dera, ndiye chandamale kukhetsa msewu wonyamukira ndege m'dera laling'ono localized dera la elekitironi ndende ndi mkulu, pamene maginito zotsatira kunja kwa dera, makamaka kutali ndi maginito a gawo lapansi padziko pafupi, ndende ya elekitironi chifukwa kubalalitsidwa kwa m'munsi kwambiri kuposa m'munsi kwambiri, ndipo mwina ngakhale dipobeca (akhoza kukhala ngakhale maginito). Kuthamanga kwa gasi wogwira ntchito wa dongosolo la magnitude). Choncho, pansi pa magnetron sputtering mikhalidwe, ndende ya ma elekitironi bombarding pamwamba pa gawo lapansi ndi otsika kwambiri kuposa wamba diode sputtering, ndi kuwonjezeka kwambiri kutentha gawo lapansi amapewa chifukwa kuchepetsa chiwerengero cha ma elekitironi zochitika pa gawo lapansi. Komanso, mu njira magnetron sputtering, anode wa magnetron sputtering chipangizo akhoza ili pafupi cathode, ndi chofukizira gawo lapansi angathenso ungrounded ndi kuyimitsidwa kuthekera, kotero kuti ma elekitironi mwina kudutsa chofukizira pansi gawo lapansi ndi kutuluka kutali kudzera anode, potero kupanga substrate mphamvu substrate kuonjezera substrate mbale kuonjezera substrate mphamvu. kutentha koyambitsidwa ndi ma elekitironi, ndikuchepetsa kwambiri bombardment yachiwiri ya electron ya gawo lapansi zomwe zimapangitsa kuti kutentha kupangidwe.

(5) Kumangirira kosagwirizana kwa chandamale. Mu chikhalidwe magnetron sputtering chandamale, ntchito m'maginito osagwirizana maginito, kotero madzi a m'magazi adzatulutsa zotsatira m'deralo convergence, adzapanga chandamale pa malo a sputtering etching mlingo ndi lalikulu, chifukwa chandamale kuti chandamale adzabala kwambiri m'goli etching. Mlingo wogwiritsiridwa ntchito womwe chandamale nthawi zambiri umakhala pafupifupi 30%. Kuti kusintha mlingo magwiritsidwe ntchito chandamale zakuthupi, mukhoza kutenga njira zosiyanasiyana kusintha, monga kuwongolera mawonekedwe ndi kugawa chandamale maginito, kuti maginito mu chandamale cathode mkati kayendedwe ndi zina zotero.

Kuvuta kutulutsa chandamale cha maginito. Ngati chandamale sputtering wapangidwa zinthu ndi mkulu maginito permeability, mizere maginito mphamvu adzadutsa mwachindunji mkati mwa chandamale kuti zimachitika maginito yochepa dera chodabwitsa, motero kupanga magnetron kutulutsa kovuta. Pofuna kupanga danga la maginito, anthu achita maphunziro osiyanasiyana, mwachitsanzo, kukhutitsa mphamvu ya maginito mkati mwa zinthu zomwe mukufuna, ndikusiya mipata yambiri yomwe mukufuna kuti ipititse patsogolo kuphulika kwa kutentha kwa maginito, kapena kuchepetsa mphamvu ya maginito ya zinthu zomwe mukufuna.

-Nkhaniyi yatulutsidwa ndiwopanga makina opangira vacuumGuangdong Zhenhua