Njirimara nke mkpuchi magnetron sputtering Isi nke 2

Njirimara nke mkpuchi magnetron sputtering

(3) Obere ume sputtering. N'ihi obere voltaji cathode etinyere na ebumnuche, a na-ejikọta plasma ahụ site na oghere magnetik dị na oghere dị nso na cathode, si otú a na-egbochi ihe ndị na-enye ike dị elu n'akụkụ akụkụ nke ndị mmadụ gbara. Ya mere, ogo mmebi nke mkpụrụ osisi dị ka ngwaọrụ semiconductor kpatara site na bọmbụ ebubo ebubo dị ala karịa nke ụzọ sputtering ndị ọzọ kpatara.

(4) Obere ọnọdụ okpomọkụ. Magnetron sputtering sputtering ọnụego dị elu, n'ihi na cathode lekwasịrị anya na ndọta dị n'ime mpaghara, ya bụ, lekwasịrị anya mwepu runway n'ime a obere localized mpaghara nke eletrọn ịta dị elu, mgbe na magnetik mmetụta n'èzí mpaghara, karịsịa pụọ ​​na magnetik nke mkpụrụ n'elu dị nso, na electron ịta n'ihi mgbasa nke ukwuu ala, na nwere ike ọbụna ịgbasa n'etiti gas abụọ dị iche iche na-arụ ọrụ (diplings nke dị ala karịa nke abụọ). nke usoro ịdị ukwuu). Ya mere, n'okpuru magnetron sputtering ọnọdụ, ịta nke electrons bombarding n'elu nke mkpụrụ bụ nnọọ ala karịa nke nkịtị diode sputtering, na a na-ezere ịrị elu nke okpomọkụ mkpụrụ okpomọkụ n'ihi mbelata ọnụ ọgụgụ nke electrons mere na mkpụrụ. Tụkwasị na nke ahụ, na usoro magnetron sputtering, anode nke magnetron sputtering ngwaọrụ nwere ike dị na gburugburu cathode gburugburu, na ihe njide nwekwara ike ịbụ nke na-enweghị ebe ọ bụla na nkwusioru ike, nke mere na electrons nwere ike ghara ịgafe site na ihe nkwụnye ihe na-agbanye n'ala ma na-esi na anode, si otú ahụ na-eme ka ọkụ eletrik dị elu na-eme ka ọkpụkpụ electrons na-ebelata, na-ebelata okpomọkụ nke electrons. na nke ukwuu attenuating nke abụọ electron bombu nke mkpụrụ nke na-akpata okpomọkụ ọgbọ.

(5) Etching nke ebumnobi na-enweghị isi. Na omenala magnetron sputtering lekwasịrị anya, ojiji nke na-ezighị ezi ndọta, otú plasma ga-emepụta a mpaghara convergence mmetụta, ga-eme ka lekwasịrị anya na mpaghara ọnọdụ nke sputtering etching ọnụego bụ oké, n'ihi bụ na lekwasịrị ga-emepụta a ịrịba na-enweghị isi etching. Ọnụego ojiji nke ebumnuche bụ n'ozuzu ihe dịka 30%. Iji meziwanye ọnụego ojiji nke ihe ezubere iche, ị nwere ike ịme usoro nkwalite dị iche iche, dị ka imeziwanye ọdịdị na nkesa nke oghere ndọta, nke mere na magnet na ebumnuche cathode n'ime mmegharị na ihe ndị ọzọ.

Ihe isi ike n'ịgbasa ebumnuche ihe ndọta. Ọ bụrụ na ebumnobi na-agbapụta bụ ihe nwere ikike ndọta dị elu, ahịrị ndọta nke ike ga-agafe ozugbo n'ime ime ebumnuche ahụ wee mee ihe dị mkpụmkpụ okirikiri magnetik, yabụ na-eme ka ọpụpụ magnetron siri ike. Iji mee ka oghere magnetik ohere, ndị mmadụ emeela ọmụmụ ihe dị iche iche, dịka ọmụmaatụ, iji saturate oghere magnet n'ime ihe mgbaru ọsọ ahụ, na-ahapụ ọtụtụ oghere na ebumnuche iji kwalite ọgbọ nke ntanye nke magnetik okpomọkụ na-abawanye, ma ọ bụ iji belata ike ndọta nke ihe mgbaru ọsọ.

–E wepụtara akụkọ aonye na-emepụta igwe mkpuchi ikukuGuangdong Zhenhua