Ƙa'idar shafe-shafe na ƙura
1, Kayan aiki da tsarin jiki na injin evaporation shafi
Kayan aikin shafe-shafe na injin daskarewa sun fi hada da dakin daki da tsarin fitarwa. A cikin dakin injin, akwai tushen evaporation (watau hita evaporation), substrate da firam ɗin substrate, dumama dumama, tsarin shayewa, da sauransu.
Ana sanya kayan shafa a cikin tushen ƙafewar ɗakin ɗakin, kuma a ƙarƙashin yanayi mai yawa, ana yin zafi da tushen ƙafe don ƙafe. Lokacin da matsakaicin matsakaicin free kewayon ƙwayoyin tururi ya fi girman madaidaiciyar ɗakin ɗakin, bayan atom da kwayoyin tururin fim ɗin sun tsere daga saman tushen ƙawancen, ba a cika samun cikas ba ta hanyar karon wasu ƙwayoyin cuta ko atom, kai tsaye su isa saman substrate ɗin don a shafa su. Saboda ƙarancin zafin jiki na ƙasa, ɓangarorin tururin fim ɗin sun taru akan sa kuma su samar da fim.
Domin inganta mannewa na evaporation kwayoyin da substrate, da substrate za a iya kunna ta dace dumama ko ion tsaftacewa. Rufin ƙanƙara mai ƙura yana tafiya ta hanyar hanyoyin jiki masu zuwa daga ƙawancen abu, jigilar kaya zuwa sakawa cikin fim.
(1) Yin amfani da hanyoyi daban-daban don canza wasu nau'o'in makamashi zuwa makamashi na thermal, kayan fim ɗin suna mai zafi don ƙafewa ko sublimate zuwa gaseous barbashi (atom, kwayoyin ko atomic clusters) tare da wani adadin makamashi (0.1 zuwa 0.3 eV).
(2) Gaseous barbashi bar fuskar fim da kuma hawa zuwa saman da substrate a wani gudun motsi, da gaske ba tare da karo, a cikin madaidaiciyar layi.
(3) A gaseous barbashi isa saman da substrate coalesce da kuma nucleate, sa'an nan girma a cikin wani m-lokaci fim.
(4) Sake tsarawa ko haɗin sinadarai na atom ɗin da ke cikin fim ɗin.
2. Haushi dumama
(1) Resistance dumama evaporation
Resistance dumama evaporation ne mafi sauki kuma mafi yawan amfani dumama hanya, kullum zartar da shafi kayan da narkewa a kasa 1500 ℃, high narkewa batu karafa a waya ko takardar siffar (W, Mo, Ti, Ta, boron nitride, da dai sauransu) yawanci sanya a cikin wani dace siffar evaporation tushen, ɗora Kwatancen tare da evaporation kayan, ta hanyar da Joule zafi narke na lantarki siffar da lantarki ko narke siffar a halin yanzu, ta hanyar da Joule zafi narke na lantarki siffar, ko lantarki platter. evaporation tushen yafi hada Multi-strand karkace, U-dimbin yawa, sine kalaman, bakin ciki farantin, jirgin ruwa, mazugi kwandon, da dai sauransu A lokaci guda, da hanya na bukatar da evaporation tushen abu da high narkewa batu, low jikewa tururi matsa lamba, barga sinadaran Properties, ba su da sinadaran dauki tare da shafi abu a high zafin jiki, mai kyau zafi juriya, kananan canji a cikin ikon da yawa, da dai sauransu, ta hanyar da shi ya dauki zafi da yawa daga cikin fim da dai sauransu. ta hanyar dumama kai tsaye, ko sanya kayan fim ɗin a cikin ƙugiya da aka yi da graphite da wasu ƙarfe oxides masu tsayayya da zafin jiki (kamar A202, B0) da sauran kayan don dumama kai tsaye don ƙafe.
Resistance dumama evaporation shafi yana da gazawa: refractory karafa da low tururi matsa lamba, wanda yake da wuya a yi bakin ciki fim; wasu abubuwa suna da sauƙi don samar da gami tare da waya mai dumama; ba abu ne mai sauƙi ba don samun nau'in nau'i na fim din alloy. Saboda tsari mai sauƙi, ƙananan farashi da sauƙi na aiki na juriya dumama hanyar evaporation, aikace-aikace ne na yau da kullum na hanyar zubar da ruwa.
(2) Electron biam dumama evaporation
Wutar wutar lantarki hanya ce ta ƙafe kayan da aka rufe ta hanyar jefa bam tare da babban ƙarfin ƙarfin lantarki ta hanyar sanya shi a cikin kwandon jan ƙarfe mai sanyaya ruwa. A evaporation tushen kunshi wani electron watsi tushen, wani electron hanzari ikon tushen, wani crucible (yawanci jan karfe crucible), a Magnetic filin nada, da kuma sanyaya ruwa saitin, da dai sauransu. crucible, wanda za a iya daukarsa a matsayin abin da aka jefa bam na crucible. Don haka, hanyar dumama katako na lantarki don ƙazantar da ruwa zai iya guje wa gurɓata tsakanin kayan shafa da kayan tushen ƙaya.
Za a iya raba tsarin tushen evaporation na lantarki zuwa nau'i uku: bindigogi madaidaiciya (Boules guns) , bindigogin zobe (wanda aka karkatar da wutar lantarki) da e-guns (wanda aka karkatar da shi ta hanyar maganadisu). Za'a iya sanya kututture ɗaya ko fiye a cikin wurin ƙafewa, wanda zai iya ƙafe da adana abubuwa daban-daban a lokaci ɗaya ko dabam.
Tushen ƙafewar katako na lantarki suna da fa'idodi masu zuwa.
① The high katako yawa na lantarki katako bombardment evaporation tushen iya samun wani nisa mafi girma makamashi yawa fiye da juriya dumama tushen, wanda zai iya ƙafe high narkewa batu kayan, kamar W, Mo, Al2O3, da dai sauransu.
② Ana sanya kayan shafa a cikin kwandon jan ƙarfe mai sanyaya ruwa, wanda zai iya guje wa ƙawancen kayan da ake fitarwa, da halayen da ke tsakanin su.
③ Za a iya ƙara zafi kai tsaye zuwa farfajiyar kayan shafa, wanda ke sa ƙimar zafin zafi ya yi girma da kuma asarar zafin zafi da zafi mai zafi.
Rashin hasara na hanyar bututun dumama wutar lantarki shine cewa na farko electrons daga bindigar lantarki da kuma na biyu electrons daga saman kayan shafa zasu ionize da evaporating atom da sauran kwayoyin gas, wanda zai shafi ingancin fim din wani lokaci.
(3) Babban mitar shigar dumama evaporation
High-mita shigar da dumama evaporation shi ne sanya crucible tare da shafi kayan a tsakiyar high-mita karkace nada, sabõda haka, da rufi abu haifar da karfi eddy halin yanzu da kuma hysteresis sakamako a karkashin shigar da high-mita electromagnetic filin, wanda ya sa da fim Layer zafi sama har sai da vaporizes da evaporates. Tushen fitar da ruwa gabaɗaya ya ƙunshi babban nada mai sanyaya ruwa da kuma graphite ko yumbu (magnesium oxide, aluminum oxide, boron oxide, da sauransu) crucible. Babban ƙarfin wutar lantarki yana amfani da mitar dubu goma zuwa dubu ɗari da yawa Hz, ƙarfin shigarwar yana da yawa zuwa ɗaruruwan kilowatts, ƙaramin ƙarar kayan membrane, mafi girman mitar shigarwa. Yawan shigar da nadawa yawanci ana yin shi ne da bututun jan ƙarfe mai sanyaya ruwa.
Lalacewar babban mitar shigar dumama hanyar ƙafewa shine cewa ba shi da sauƙi a daidaita ƙarfin shigarwar, yana da fa'idodi masu zuwa.
①Maɗaukakin ƙazamin ƙashin ruwa
②The zafin jiki na evaporation tushen ne uniform da kuma barga, don haka ba shi da sauki don samar da sabon abu na shafi droplets fantsama, kuma yana iya kauce wa sabon abu na pinholes a kan ajiye fim.
③An ɗora tushen ƙafewar sau ɗaya, kuma zafin jiki yana da sauƙi da sauƙi don sarrafawa.
Lokacin aikawa: Oktoba-28-2022