Njengoba ubuchwepheshe bokumboza nge-sputtering bukhula, ikakhulukazi ubuchwepheshe bokumboza nge-magnetron sputtering, okwamanje, noma iyiphi into ingalungiswa ngefilimu yokuhlonza i-ion, ngoba ithagethi igxotshwa enqubweni yokuyimboza ngohlobo oluthile lwe-substrate, ikhwalithi yefilimu egxotshiwe inomthelela obalulekile, ngakho-ke, izidingo zezinto eziqondiwe nazo ziqinile kakhulu. Ekukhetheni izinto eziqondiwe, ngaphezu kokusetshenziswa kwefilimu ngokwayo kufanele kukhethwe, kufanele futhi kucatshangelwe lezi zinkinga ezilandelayo:
1. Izinto eziqondiwe kufanele zibe namandla amahle okusebenza kanye nokuqina kwamakhemikhali ngemva kokwakheka kwefilimu
2. Inhlanganisela ye-target kanye ne-substrate kumele ibe namandla, kungenjalo kufanele ithathwe ne-substrate inenhlanganisela enhle yezinto zokwakheka kwe-membrane, kuqala ikhiphe ifilimu eyisisekelo bese kulungiswa ungqimba lwe-membrane oludingekayo.
3 njengokusabela, izinto ze-membrane ezikhipha amanzi kumele kube lula ukusabela negesi ukuze kukhiqizwe i-membrane ehlanganisiwe; 4.
4. Ngaphansi kwesisekelo sokuhlangabezana nezidingo zokusebenza kwe-membrane, umehluko phakathi kwe-coefficient yokwanda kokushisa kwezinto eziqondiwe kanye ne-substrate mncane ngangokunokwenzeka, ukuze kuncishiswe umphumela wokucindezeleka kokushisa ku-membrane echithekile.
Ithonya lokucindezeleka kokushisa kwefilimu yokubhoboza; 5.
5. Ngokwezidingo zokusetshenziswa nokusebenza kwe-membrane, izinto eziqondiwe kumele zihlangabezane nobumsulwa, okuqukethwe ukungcola, ukufana kwezingxenye, ukunemba komshini kanye nezinye izidingo zobuchwepheshe.
–Lesi sihloko sikhishwe yi-umenzi womshini wokumboza nge-vacuumI-Guangdong Zhenhua
Isikhathi sokuthunyelwe: Disemba-21-2023