Njengoko iteknoloji yokugquma i-sputtering ikhula, ingakumbi iteknoloji yokugquma i-magnetron, okwangoku, nayiphi na into ingalungiselelwa ngefilimu yokujolisa ye-ion bombardment, kuba ithagethi igxojwa kwinkqubo yokugquma ukuya kuhlobo oluthile lwe-substrate, umgangatho wefilimu egxojwayo unempembelelo ebalulekileyo, ngoko ke, iimfuno zezinto ezijoliswe kuzo nazo zingqongqo ngakumbi. Ekukhetheni izinto ezijoliswe kuzo, ukongeza ekusebenziseni ifilimu ngokwayo kufuneka kukhethwe, kufuneka kuqwalaselwe le micimbi ilandelayo:
1. Izinto ekujoliswe kuzo kufuneka zibe namandla afanelekileyo oomatshini kunye nozinzo lweekhemikhali emva kokwenziwa kwefilimu
2. Indibaniselwano yethagethi kunye ne-substrate kufuneka ibe namandla, kungenjalo kufuneka ithathwe kunye ne-substrate inomxube olungileyo wezinto ze-membrane, kuqala itshiza ifilimu esisiseko kwaye emva koko kulungiswe umaleko we-membrane ofunekayo.
3 njengempendulo, izinto ze-membrane ezitshizayo kufuneka kube lula ukusabela negesi ukuvelisa i-membrane edibeneyo; 4.
4. Phantsi kwengcamango yokuhlangabezana neemfuno zokusebenza kwe-membrane, umahluko phakathi kwe-coefficient yokwandiswa kobushushu bezinto ezijoliswe kuzo kunye ne-substrate mncinci kangangoko, ukuze kuncitshiswe impembelelo yoxinzelelo lobushushu kwi-membrane etshileyo.
Impembelelo yoxinzelelo lobushushu lwefilimu ekhupha umoya; 5.
5. Ngokweemfuno zokusetyenziswa nokusebenza kwe-membrane, izinto ekujoliswe kuzo kufuneka zihlangabezane nobunyulu, umxholo wokungcola, ukufana kwecandelo, ukuchaneka komatshini kunye nezinye iimfuno zobugcisa.
–Eli nqaku likhutshwe nguumenzi womatshini wokugquma nge-vacuumGuangdong Zhenhua
Ixesha lokuthumela: Disemba-21-2023