Nrog rau kev txhim kho ntawm cov txheej txheem sputtering txheej txheem, tshwj xeeb tshaj yog magnetron sputtering txheej txheem, tam sim no, rau txhua yam khoom siv tuaj yeem npaj los ntawm ion bombardment target film, vim tias lub hom phiaj yog sputtered thaum lub sijhawm txheej txheem nws rau qee yam substrate, qhov zoo ntawm sputtered zaj duab xis muaj qhov cuam tshuam tseem ceeb, yog li ntawd, qhov yuav tsum tau ua ntawm cov khoom siv lub hom phiaj kuj tseem nruj dua. Hauv kev xaiv cov khoom siv lub hom phiaj, ntxiv rau kev siv cov yeeb yaj kiab nws tus kheej yuav tsum tau xaiv, kuj yuav tsum xav txog cov teeb meem hauv qab no:
1. Cov khoom siv yuav tsum muaj lub zog zoo thiab kev ruaj khov tom qab tsim cov yeeb yaj kiab
2. Lub hom phiaj thiab cov khoom siv ua ke yuav tsum muaj zog, txwv tsis pub yuav tsum tau coj nrog cov khoom siv ua ke zoo ntawm cov khoom siv membrane, ua ntej sputtering ib zaj duab xis puag thiab tom qab ntawd npaj cov txheej membrane uas xav tau.
3 ua ib qho tshuaj tiv thaiv sputtering membrane cov khoom siv yuav tsum yooj yim rau react nrog cov roj los tsim cov tshuaj sib xyaw membrane; 4.
4. Raws li lub hauv paus ntawm kev ua tau raws li qhov yuav tsum tau ua ntawm kev ua haujlwm ntawm daim nyias nyias, qhov sib txawv ntawm cov coefficient ntawm thermal expansion ntawm cov khoom siv thiab cov substrate yog me me li sai tau, yog li ntawd kom txo qhov cuam tshuam ntawm thermal kev ntxhov siab rau ntawm daim nyias nyias sputtered.
Kev cuam tshuam ntawm kev ntxhov siab thermal ntawm zaj duab xis sputtering; 5.
5. Raws li kev siv thiab kev ua tau zoo ntawm daim nyias nyias, cov khoom siv yuav tsum ua tau raws li qhov huv, cov ntsiab lus tsis huv, kev sib npaug ntawm cov khoom, kev ua haujlwm raug thiab lwm yam kev cai.
– Tsab xov xwm no yog tso tawm los ntawmlub tshuab nqus tsev txheej tshuab chaw tsim khoomGuangdong Zhenhua
Lub sijhawm tshaj tawm: Lub Kaum Ob Hlis-21-2023