I-sputtering vacuum coater iyithuluzi elisetshenziselwa ukufaka amafilimu amancane ezinto ezisetshenziswayo ku-substrate. Le nqubo ivame ukusetshenziswa ekukhiqizweni kwama-semiconductor, amaseli elanga, kanye nezinhlobo ezahlukene zokumboza izinhlelo zokusebenza ze-optical neze-elekthronikhi. Nasi isifinyezo esiyisisekelo sendlela esebenza ngayo:
1. Igumbi Lokusula Imfucuza: Le nqubo yenzeka ngaphakathi kwegumbi lokusula imfucuza ukuze kuncishiswe ukungcola futhi kuvunyelwe ukulawula kangcono inqubo yokubeka imfucuza.
2. Izinto Eziqondiwe: Izinto ezizofakwa zaziwa ngokuthi yi-target. Lokhu kufakwa ngaphakathi kwegumbi le-vacuum.
3. I-substrate: I-substrate yizinto okuzobekwa kuzo ifilimu encane. Iphinde ibekwe ngaphakathi kwegumbi le-vacuum.
4. Ukukhiqizwa kwe-Plasma: Igesi engasebenzi, ngokuvamile i-argon, ifakwa ekamelweni. I-voltage ephezulu ifakwa endaweni eqondiwe, okudala i-plasma (isimo sendaba esakhiwa ama-electron nama-ion akhululekile).
5. Ukubhoboza: Ama-ion avela ku-plasma angqubuzana nezinto eziqondiwe, akhiphe ama-athomu noma ama-molecule esivivinyweni. Lezi zinhlayiya zibe sezihamba nge-vacuum bese zingena esivivinyweni, zakhe ifilimu encane.
6. Ukulawula: Ubukhulu nokwakheka kwefilimu kungalawulwa ngokunembile ngokulungisa amapharamitha afana namandla asetshenziswa kuthagethi, ingcindezi yegesi engasebenzi, kanye nobude benqubo yokuphalaza.
–Lesi sihloko sikhishwe yi-umenzi womshini wokumboza nge-vacuumI-Guangdong Zhenhua
Isikhathi sokuthunyelwe: Julayi-12-2024