Na'urar rufewa ta injin tsotsa na'ura ce da ake amfani da ita wajen saka siririn fim na abu a kan wani abu. Ana amfani da wannan tsari sosai wajen samar da semiconductors, ƙwayoyin hasken rana, da nau'ikan rufi daban-daban don aikace-aikacen gani da na lantarki. Ga taƙaitaccen bayani game da yadda yake aiki:
1. Ɗakin Vacuum: Ana yin wannan aikin ne a cikin ɗakin vacuum don rage gurɓatawa da kuma ba da damar samun ingantaccen iko kan tsarin adanawa.
2. Kayan da aka yi niyya: Ana kiran kayan da za a ajiye a matsayin abin da aka nufa. Ana sanya shi a cikin ɗakin injin.
3. Substrate: Substrate shine kayan da za a saka siririn fim ɗin a kai. Haka kuma ana sanya shi a cikin ɗakin injin.
4. Samar da Plasma: Ana shigar da iskar gas mara aiki, yawanci argon, cikin ɗakin. Ana amfani da babban ƙarfin lantarki a kan abin da aka nufa, wanda ke samar da plasma (yanayin matter wanda ya ƙunshi electrons da ions kyauta).
5. Watsawa: Ion daga cikin plasma ya yi karo da abin da aka nufa, yana fitar da atom ko kwayoyin halitta daga abin da aka nufa. Waɗannan barbashi daga nan sai su ratsa ta cikin injin sannan su zuba a kan substrate, suna samar da siririn fim.
6. Kulawa: Ana iya sarrafa kauri da abun da ke cikin fim ɗin daidai ta hanyar daidaita sigogi kamar ƙarfin da aka yi amfani da shi ga abin da aka nufa, matsin lamba na iskar gas mara aiki, da tsawon lokacin aikin sputtering.
– An fitar da wannan labarin ne dagainjin shafa injin injinGuangdong Zhenhua
Lokacin Saƙo: Yuli-12-2024