Chophimba vacuum chothira madzi ndi chipangizo chomwe chimagwiritsidwa ntchito kuyika mafilimu opyapyala a zinthu pa substrate. Njirayi imagwiritsidwa ntchito kwambiri popanga ma semiconductors, ma solar cell, ndi mitundu yosiyanasiyana ya zokutira zamagetsi ndi zamagetsi. Nayi chidule cha momwe imagwirira ntchito:
1. Chipinda Chotsukira Utsi: Njirayi imachitika mkati mwa chipinda chotsukira utsi kuti muchepetse kuipitsidwa ndikuthandizira kuti pakhale kuwongolera bwino njira yotulutsira utsi.
2. Zinthu Zofunika Kuziika: Zinthu zomwe ziyenera kuyikidwamo zimadziwika kuti cholinga. Izi zimayikidwa mkati mwa chipinda chotsukira mpweya.
3. Substrate: Substrate ndi chinthu chomwe filimu yopyapyala idzaikidwapo. Imayikidwanso mkati mwa chipinda chopanda mpweya.
4. Kupanga Magazi: Mpweya wopanda mphamvu, womwe nthawi zambiri umakhala wa argon, umalowetsedwa m'chipindamo. Mphamvu yamagetsi yapamwamba imayikidwa pa cholinga, zomwe zimapangitsa plasma (mkhalidwe wa chinthu chokhala ndi ma electron ndi ma ayoni omasuka).
5. Kutulutsa madzi: Ma ayoni ochokera mu plasma amagundana ndi chinthu chomwe chikufunidwa, zomwe zimagwetsa maatomu kapena mamolekyu kuchokera pa chinthucho. Kenako tinthu timeneti timadutsa mu vacuum ndikugwera pa substrate, ndikupanga filimu yopyapyala.
6. Kulamulira: Kukhuthala ndi kapangidwe ka filimuyi kumatha kulamulidwa bwino posintha magawo monga mphamvu yomwe imagwiritsidwa ntchito pa chandamale, kuthamanga kwa mpweya wosagwira ntchito, komanso nthawi yomwe ntchito yothira madzi imatuluka.
– Nkhaniyi yatulutsidwa ndiwopanga makina ophikira vacuumGuangdong Zhenhua
Nthawi yotumizira: Julayi-12-2024