Isiqondiso sokuthuthukiswa kobuchwepheshe bamaseli e-silicon acwebezelayo sihlanganisa nobuchwepheshe be-PERT kanye nobuchwepheshe be-Topcon, lobu buchwepheshe obubili bubhekwa njengokwelulwa kobuchwepheshe bamaseli obusetshenziswa ngendlela yendabuko yokusabalalisa, izici zabo ezivamile ungqimba lokuhamba ngemuva kweseli, futhi bobabili basebenzisa ungqimba lwe-poly silicon efakwe i-doped njengensimu yangemuva, isikole sisetshenziswa kakhulu kungqimba olufakwe i-oxidized lokushisa eliphezulu, kanti ungqimba lwe-poly silicon efakwe i-doped lusetshenziswa ngendlela ye-LPCVD kanye ne-PECVD, njll. I-Tubular PECVD kanye ne-Tubular PECVD kanye ne-flat plate PECVD zisetshenziswe ekukhiqizweni okukhulu kwamaseli e-PERC.
I-Tubular PECVD inomthamo omkhulu futhi ngokuvamile isebenzisa amandla aphansi afinyelela kumashumi amaningana e-kHz. Izinkinga zokuqhuma kwe-ion kanye ne-bypass plating zingathinta ikhwalithi yesendlalelo sokudlulisa. I-flat plate PECVD ayinayo inkinga ye-bypass plating, futhi inenzuzo enkulu ekusebenzeni kwe-coating, futhi ingasetshenziswa ekubekeni amafilimu e-doped Si, Si0X, SiCX. Ububi ukuthi ifilimu efakwe i-plated iqukethe i-hydrogen eningi, okulula ukuyibangela ukugqabhuka kwesendlalelo sefilimu, okulinganiselwe ekujikeni kwesendlalelo. Ubuchwepheshe be-plated lpcvd obusebenzisa i-tube furnace coating, enomthamo omkhulu, bungabeka ifilimu ye-polysilicon ejiyile, kodwa kuzoba khona i-plating eyenzeka, enqubweni ye-lpcvd ngemuva kokususwa kwe-plating yesendlalelo sefilimu futhi ayilimazi isendlalelo esingezansi. Amaseli e-Topcon akhiqizwe ngobuningi afinyelele ukusebenza kahle kokuguqulwa okungu-23%.
——Lesi sihloko sikhishwe yi-umshini wokumboza we-vacuumI-Guangdong Zhenhua
Isikhathi sokuthunyelwe: Septhemba-22-2023