Nzira yekuvandudzwa kwetekinoroji yemasero e crystalline silicon inosanganisirawo tekinoroji yePERT netekinoroji yeTopcon, matekinoroji maviri aya anoonekwa sekuwedzera kwetekinoroji yemasero echinyakare ekupararira, hunhu hwawo hwakajairika ipasivati ...
Tubular PECVD ine simba guru uye inowanzoshandisa simba remagetsi risingawanzo shandiswa remakumi akati wandei e kHz. Matambudziko eIon bombardment uye bypass plating anogona kukanganisa kunaka kwe passivation layer. Flat plate PECVD haina dambudziko re bypass plating, uye ine mukana wakakura mu coating performance, uye inogona kushandiswa kuisa doped Si, Si0X, SiCX films. Dambudziko nderekuti plate yakaputirwa ine hydrogen yakawanda, iri nyore kukonzera blistering ye film layer, ine gobvu shoma mu coating. lpcvd coating tekinoroji inoshandisa tube furnace coating, ine simba guru, inogona kuisa polysilicon firimu yakakora, asi pachava ne plating inoitika, mu lpcvd process mushure mekubviswa kwe plating ye film layer uye haikuvadzi pasi. Topcon cells dzakagadzirwa dzakawana avhareji yekushanda kwekushandura kwe23%.
——Chinyorwa ichi chakaburitswa namuchina wevacuum unhaniGuangdong Zhenhua
Nguva yekutumira: Gunyana-22-2023