Njira yopangira ukadaulo wa maselo a silicon imaphatikizanso ukadaulo wa PERT ndi ukadaulo wa Topcon, ukadaulo uwu umaonedwa ngati njira yowonjezera ukadaulo wa maselo achikhalidwe, makhalidwe awo ofanana ndi gawo la passivation kumbuyo kwa selo, ndipo onse amagwiritsa ntchito gawo la poly silicon ngati gawo lakumbuyo, sukuluyi imagwiritsidwa ntchito kwambiri mu gawo lotentha kwambiri, ndipo gawo la poly silicon lopangidwa ndi doped limagwiritsidwa ntchito ngati LPCVD ndi PECVD, ndi zina zotero. Tubular PECVD ndi Tubular PECVD ndi flat plate PECVD zagwiritsidwa ntchito popanga maselo a PERC ambiri.
PECVD ya Tubular ili ndi mphamvu zambiri ndipo nthawi zambiri imagwiritsa ntchito mphamvu zochepa za kHz makumi angapo. Mavuto a ion bombardment ndi bypass plating angakhudze ubwino wa passivation layer. Flat plate PECVD ilibe vuto la bypass plating, ndipo ili ndi ubwino waukulu pakugwira ntchito kwa glaze, ndipo ingagwiritsidwe ntchito poika mafilimu a Si, Si0X, SiCX opangidwa ndi doped. Choyipa chake ndichakuti filimu yophimbidwa ili ndi haidrojeni yambiri, yosavuta kuyambitsa matuza a filimu, yomwe ndi yochepa mu makulidwe a glaze. Ukadaulo wa lpcvd coating pogwiritsa ntchito chubu ng'anjo coating, yokhala ndi mphamvu yayikulu, imatha kuyika filimu yokhuthala ya polysilicon, koma padzakhala kuzungulira plating kumachitika, mu lpcvd process pambuyo pochotsa kuzungulira plating ya filimuyo ndipo sikuvulaza pansi. Maselo a Topcon opangidwa ndi anthu ambiri apeza avareji ya kusintha kwa 23%.
——Nkhaniyi yatulutsidwa ndimakina ophikira osakanizaGuangdong Zhenhua
Nthawi yotumizira: Sep-22-2023

