Nduzi nke mmepe teknụzụ mkpụrụ ndụ silicon kristal gụnyekwara teknụzụ PERT na teknụzụ Topcon, a na-ewere teknụzụ abụọ a dị ka ndọtị nke usoro mgbasa ozi ọdịnala nke teknụzụ mkpụrụ ndụ, njirimara ha bụ oyi akwa passivation n'azụ mkpụrụ ndụ ahụ, ha abụọ na-ejikwa oyi akwa poly silicon doped dị ka ubi azụ, a na-ejikarị ụlọ akwụkwọ eme ihe na oyi akwa oxidized dị elu, a na-ejikwa oyi akwa poly silicon doped n'ụzọ LPCVD na PECVD, wdg. Ejirila Tubular PECVD na Tubular PECVD na plate flat PECVD mee ihe na mmepụta buru ibu nke mkpụrụ ndụ PERC.
PECVD tubular nwere nnukwu ikike ma na-ejikarị obere ike nke ọtụtụ iri kHz. Nsogbu nke igbukpọ ion na mgbochi site na iji ihe mkpuchi nwere ike imetụta ịdị mma nke oyi akwa passivation. PECVD dị larịị enweghị nsogbu nke mgbochi site na iji ihe mkpuchi, ọ nwekwara uru ka ukwuu na arụmọrụ mkpuchi, enwere ike iji ya maka itinye ihe nkiri Si, Si0X, na SiCX doped. Ihe na-adịghị mma bụ na ihe nkiri a pịrị apị nwere ọtụtụ hydrogen, dị mfe ibute ọnya nke oyi akwa ihe nkiri ahụ, nke pere mpe na ọkpụrụkpụ nke mkpuchi ahụ. Teknụzụ mkpuchi lpcvd nke na-eji mkpuchi ọkụ tube, nwere nnukwu ikike, nwere ike itinye ihe nkiri polysilicon dị arọ, mana a ga-enwe gburugburu mkpuchi ahụ, na usoro lpcvd mgbe ewepụchara mkpuchi gburugburu oyi akwa ihe nkiri ahụ ma ọ naghị emerụ oyi akwa ala ahụ. Mkpụrụ ndụ Topcon emepụtara nke ukwuu enwetala arụmọrụ ntụgharị nkezi nke 23%.
——E bipụtara akụkọ a site n'aka onyeigwe mkpuchi ikukuGuangdong Zhenhua
Oge ozi: Sep-22-2023