Indlela yophuhliso lwetekhnoloji yeseli ye-silicon ekristale ikwabandakanya itekhnoloji ye-PERT kunye netekhnoloji ye-Topcon, ezi teknoloji zimbini zithathwa njengolwandiso lwetekhnoloji yeseli yendlela yokusasazwa kwendabuko, iimpawu zazo ezifanayo lulwandlalelo lwe-passivation kwicala elingasemva leseli, kwaye zombini zisebenzisa umaleko we-poly silicon edotshiweyo njengentsimi yangasemva, isikolo sisetyenziswa kakhulu kumaleko oxidized obushushu obuphezulu, kwaye umaleko we-poly silicon edotshiweyo usetyenziswa ngendlela ye-LPCVD kunye ne-PECVD, njl. I-Tubular PECVD kunye ne-Tubular PECVD kunye ne-flat plate PECVD zisetyenzisiwe kwimveliso enkulu yeeseli ze-PERC.
I-Tubular PECVD inomthamo omkhulu kwaye ngokubanzi isebenzisa umbane ophantsi ongama-kHz amashumi aliqela. Iingxaki ze-ion bombardment kunye ne-bypass plating zinokuchaphazela umgangatho womaleko we-passivation. I-Flat plate PECVD ayinayo ingxaki ye-bypass plating, kwaye inenzuzo enkulu ekusebenzeni kwe-coating, kwaye ingasetyenziselwa ukubeka iifilimu ze-Si, Si0X, SiCX ezifakwe i-doped. Ingxaki kukuba ifilimu efakwe i-plated ine-hydrogen eninzi, kulula ukuyibangela ukuba i-blister yomaleko wefilimu ibonakale, inqunyelwe kubukhulu be-coating. Itekhnoloji ye-lpcvd coating esebenzisa i-tube furnace coating, enomthamo omkhulu, inokufaka ifilimu ye-polysilicon etyebileyo, kodwa kuya kubakho ukujikeleza kwe-plating, kwinkqubo ye-lpcvd emva kokususwa kwe-plating yomaleko wefilimu kwaye ayilimazi umaleko osezantsi. Iiseli ze-Topcon eziveliswe ngobuninzi zifikelele kwi-avareji yokusebenza kokuguqulwa kwe-23%.
——Eli nqaku likhutshwe nguumatshini wokugquma nge-vacuumGuangdong Zhenhua
Ixesha lokuthumela: Sep-22-2023