Icyerekezo cy’iterambere ry’ikoranabuhanga rya seli ya silikoni ikoze muri kristale kirimo kandi ikoranabuhanga rya PERT na ikoranabuhanga rya Topcon, izi koranabuhanga zombi zifatwa nk'inyongera y’ikoranabuhanga rya seli risanzwe rikoreshwa mu gukwirakwiza, imiterere yazo ihuriweho ni urwego rwa passivation inyuma y’iseli, kandi zombi zikoresha urwego rwa silikoni ya silikoni nk'inyuma, ishuri rikoreshwa cyane mu urwego rwa oxidized ruri hejuru, naho urwego rwa silikoni ya silikoni ikozwe muri LPCVD na PECVD, nibindi. Tubular PECVD na Tubular PECVD na flat plate PECVD byakoreshejwe mu gukora seli za PERC ku bwinshi.
PECVD y'ibice binini ifite ubushobozi bwinshi kandi muri rusange ikoresha ingufu nke za kHz mirongo. Ibibazo byo gutemba no gufunga bypass bishobora kugira ingaruka ku bwiza bw'urwego rwo gufunga. PECVD y'ibice binini ntabwo ifite ikibazo cyo gufunga bypass, kandi ifite inyungu nini mu mikorere yo gufunga, kandi ishobora gukoreshwa mu gushyiramo filime za Si, Si0X, SiCX za doped. Imbogamizi ni uko filime ipfundikiye irimo hydrogen nyinshi, yoroshye gutera uduce twa filime, ifite ubugari buciriritse mu gipfundikizo. Ikoranabuhanga ryo gufunga lpcvd rikoresha igipfundikizo cy'ifuru, gifite ubushobozi bunini, gishobora gushyiramo filime nini ya polysilicon, ariko hazabaho hafi ya plating ibaho, mu nzira ya lpcvd nyuma yo gukuraho plating y'urwego rwa filime kandi ntigira ingaruka ku rwego rwo hasi. Utunyangingo twa Topcon twakozwe ku bwinshi twageze ku mpuzandengo y'ubushobozi bwo guhindura 23%.
——Iyi nkuru yasohotse naimashini ikoresha icyuma gikingira umwukaGuangdong Zhenhua
Igihe cyo kohereza: 22 Nzeri 2023