Kei roto hoki i te ahunga o te whanaketanga o te hangarau pūtau silicon tioata te hangarau PERT me te hangarau Topcon, e kiia ana ēnei hangarau e rua he toronga o te hangarau pūtau tikanga tohatoha tuku iho, ko ō rāua āhuatanga noa ko te paparanga passivation i te taha muri o te pūtau, ā, e rua e whakamahi ana i te paparanga o te silicon poly kua pania hei papa muri, ko te nuinga o te wā ka whakamahia i roto i te paparanga oxidized pāmahana teitei, ā, ko te paparanga silicon poly kua pania ka whakamahia i roto i te ara o te LPCVD me te PECVD, me ētahi atu. Kua whakamahia te PECVD ngongo me te PECVD ngongo me te PECVD pereti papatahi i roto i te hanga papatipu nui o ngā pūtau PERC.
He nui te kaha o te PECVD ngongo, ā, he maha ngā wā ka whakamahia he pūtake hiko auau-iti o ngā tekau kHz. Ka pāngia te kounga o te paparanga passivation e ngā raruraru o te pupuhi katote me te whakakikorua taha. Kāore he raruraru whakakikorua taha o te PECVD pereti papatahi, ā, he nui ake te painga o te mahi paninga, ā, ka taea te whakamahi mō te whakatakoto i ngā kiriata Si, Si0X, SiCX kua pania. Ko te ngoikoretanga ko te nui o te hauwai kei roto i te kiriata whakakikorua, he ngāwari ki te pupuhi i te paparanga kiriata, he iti te matotoru o te paninga. Mā te hangarau paninga lpcvd e whakamahi ana i te paninga oumu ngongo, he nui te kaha, ka taea te whakatakoto i te kiriata polysilicon matotoru ake, engari ka puta he whakakikorua huri noa i te paparanga, i roto i te tukanga lpcvd i muri i te tango i te paparanga kiriata huri noa i te paparanga, ā, kāore e whara i te paparanga o raro. Kua tutuki i ngā pūtau Topcon papatipu te toharite o te pai o te tahuritanga o te 23%.
——Nā temīhini paninga korehauGuangdong Zhenhua
Wā tuku: Hepetema-22-2023