Ngokukhula kophuhliso lwetekhnoloji yokugquma itekhnoloji, ngakumbi i-magnetron sputtering itekhnoloji yokwaleka, okwangoku, kuyo nayiphi na imathiriyeli inokulungiswa ngefilim ye-ion bombardment, kuba ekujoliswe kuyo kuchithwa kwinkqubo yokuyigquma kuhlobo oluthile lwe-substrate, umgangatho wefilimu ephothiweyo unempembelelo ebalulekileyo, ngoko ke, iimfuno zezinto ekujoliswe kuzo nazo zingqongqo ngakumbi. Ekukhethweni kwezinto ezijoliswe kuyo, ngaphezu kokusetyenziswa kwefilimu ngokwayo kufuneka kukhethwe, kufuneka kuqwalaselwe le miba ilandelayo:
1. Izinto ezijoliswe kuzo kufuneka zibe namandla omatshini kunye nokuzinza kweekhemikhali emva kokubunjwa kwefilimu
2. Ithagethi kunye ne-substrate indibaniselwano kufuneka ibe yomelele, kungenjalo kufuneka ithathwe kunye ne-substrate inomdibaniso olungileyo we-membrane, kuqala i-sputtering ifilimu yesiseko kunye nokulungiswa kwe-membrane efunekayo.
3 njenge-reaction sputtering inwebu izinto kufuneka kube lula ukusabela kunye negesi ukuvelisa iikhompawundi inwebu; 4.
4. Ngaphantsi kwesiseko sokuhlangabezana neemfuno zentsebenzo ye-membrane, umehluko phakathi kwe-coefficient yokwandiswa kwe-thermal yezinto ezijoliswe kuyo kunye ne-substrate incinci kangangoko kunokwenzeka, ukwenzela ukuba kuncitshiswe umphumo woxinzelelo lwe-thermal kwi-membrane e-sputtered.
Impembelelo yoxinzelelo lwe-thermal yefilimu ye-sputtering; 5.
5. Ngokweemfuno zokusetyenziswa kunye nokusebenza kwe-membrane, izinto ezijoliswe kuzo kufuneka zihlangabezane nokucoceka, umxholo wokungcola, ukulingana kwecandelo, ukuchaneka kwe-machining kunye nezinye iimfuno zobugcisa.
–Eli nqaku likhutshwa nguumenzi womatshini wokugqumaGuangdong Zhenhua
Ixesha lokuposa: Dec-21-2023