Ikirangantego cya vacuum ni igikoresho gikoreshwa mugushyira firime yoroheje yibikoresho kuri substrate. Ubu buryo busanzwe bukoreshwa mugukora semiconductor, selile izuba, nubwoko butandukanye bwo gutwikira ibikoresho bya optique na elegitoroniki. Dore incamake yibanze yuburyo ikora:
1.Urugereko rwa Vacuum: Inzira ibera imbere mucyumba cya vacuum kugirango igabanye umwanda kandi itume habaho kugenzura neza uburyo bwo kubitsa.
2.Intego yibikoresho: Ibikoresho bizashyirwa bizwi nkintego. Ibi bishyirwa imbere mucyumba cya vacuum.
3.Substrate: Substrate ni ibikoresho bizashyirwamo firime yoroheje. Irashyirwa kandi imbere mu cyumba cya vacuum.
4.Pasma Igisekuru: Gazi ya inert, ubusanzwe argon, yinjizwa mubyumba. Umuvuduko mwinshi ushyirwa kumugambi, ukora plasma (imiterere yibintu bigizwe na electroni na ion byubusa).
5.Gusohora: Ions ziva muri plasma zigongana nibikoresho bigenewe, gukubita atom cyangwa molekile kurugero. Ibyo bice noneho bigenda muri vacuum hanyuma bigashyirwa kuri substrate, bigakora firime yoroheje.
6.Umugenzuzi: Ubunini hamwe nibigize firime birashobora kugenzurwa neza muguhindura ibipimo nkimbaraga zikoreshwa kuntego, umuvuduko wa gaze ya inert, nigihe cyigihe cyo gusohoka.
–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua
Igihe cyo kohereza: Nyakanga-12-2024