Gutezimbere tekinoroji ya silicon izuba

Icyerekezo cyiterambere rya tekinoroji ya kirisiti ya kirisiti kandi ikubiyemo ikoranabuhanga rya PERT hamwe n’ikoranabuhanga rya Topcon, ubwo buryo bwombi bufatwa nko kwagura uburyo bwa tekinoroji yo gukwirakwiza uburyo bwa selile, ibyo bahuriyemo ni passivation layer kuruhande rwinyuma rwakagari, kandi byombi bifashisha urwego rwa silikoni ya dopike nkumurima winyuma, ishuri rikoreshwa cyane mubushuhe bwa oxydeire ya TEC hamwe na TEC ya PEC PEC. PECVD hamwe nisahani iringaniye PECVD yakoreshejwe mugikorwa kinini cyo gukora selile ya PERC.

Tubular PECVD ifite ubushobozi bunini kandi mubisanzwe ikoresha amashanyarazi make-yumuriro wa kHz mirongo. Ibisasu bya Ion hamwe nibibazo bya plaque birashobora kugira ingaruka kumiterere ya passivation. Isahani ya plaque PECVD ntabwo ifite ikibazo cyo gusiba bypass, kandi ifite inyungu nini mubikorwa byo gutwikira, kandi irashobora gukoreshwa mugushira ama firime ya Si, Si0X, SiCX. Ikibi ni uko firime isize irimo hydrogène nyinshi, byoroshye gutera ibisebe bya firime, bigarukira mubunini bwa coating. tekinoroji ya lpcvd ikoresheje itanura rya feri, ifite ubushobozi bunini, irashobora kubitsa firime ndende ya polysilicon, ariko hazaba hafi ya plaque ibaho, mugikorwa cya lpcvd nyuma yo gukuraho hafi yicyapa cya firime kandi ntikibabaza urwego rwo hasi. Ingirabuzimafatizo za Topcon zimaze kugera ku kigereranyo cya 23%.

—— Iyi ngingo yasohowe naimashini itwikiriyeGuangdong Zhenhua