Ndi kukula kwa sputtering ❖ kuyanika luso, makamaka magnetron sputtering ❖ kuyanika luso, pakali pano, kwa zinthu zilizonse akhoza kukonzekera ndi ion bombardment chandamale filimu, chifukwa chandamale sputtered m'kati ❖ kuyanika kwa mtundu wina wa gawo lapansi, khalidwe la sputtered filimu ali ndi zotsatira zofunika, Choncho, zofunika za chandamale chandamale ndi wovuta kwambiri. Posankha zinthu zomwe mukufuna, kuwonjezera pakugwiritsa ntchito filimu yokhayo iyenera kusankhidwa, iyeneranso kuganizira zotsatirazi:
1. Zolinga zomwe zimapangidwira ziyenera kukhala ndi mphamvu zamakina zabwino komanso kukhazikika kwamankhwala pambuyo pakupanga filimuyo
2. Kuphatikizika kwa chandamale ndi gawo lapansi kuyenera kukhala kolimba, apo ayi kuyenera kutengedwa ndi gawo lapansili lili ndi kaphatikizidwe kabwino ka nembanemba, choyamba kutulutsa filimu yoyambira kenako kukonzekera gawo lofunikira la nembanemba.
3 monga anachita sputtering nembanemba zakuthupi ayenera kukhala zosavuta anachita ndi mpweya kupanga mankhwala nembanemba; 4.
4. Pogwirizana ndi zofunikira za ntchito ya membrane, kusiyana pakati pa coefficient of thermal extension of the target material and the substrate ndi yaying'ono momwe mungathere, kuti muchepetse zotsatira za kupsinjika kwa kutentha pazitsulo zowonongeka.
Chikoka cha matenthedwe kupsyinjika kwa sputtering filimu; 5.
5. Malinga ndi kagwiritsidwe ntchito ndi kagwiridwe ka ntchito ka nembanemba, zinthu zomwe mukufunazo ziyenera kukwaniritsa chiyero, zonyansa, chigawo chimodzi, kulondola kwa makina ndi zofunikira zina zamakono.
-Nkhaniyi yatulutsidwa ndiwopanga makina opangira vacuumGuangdong Zhenhua
Nthawi yotumiza: Dec-21-2023