Chophimba chopukutira ndi chipangizo chomwe chimagwiritsidwa ntchito kuyika mafilimu opyapyala pagawo laling'ono. Njirayi imagwiritsidwa ntchito kwambiri popanga ma semiconductors, ma cell a solar, ndi mitundu yosiyanasiyana ya zokutira zopangira zowoneka bwino ndi zamagetsi. Nazi mwachidule momwe zimagwirira ntchito:
1.Chamber Vacuum: Ndondomekoyi imachitika mkati mwa chipinda chosungiramo mpweya kuti muchepetse kuipitsidwa ndi kulola kulamulira bwino pa ndondomeko yoyikapo.
2.Target Material: Zomwe ziyenera kuyikidwa zimadziwika kuti chandamale. Izi zimayikidwa mkati mwa chipinda cha vacuum.
3.Substrate: Gawoli ndilo zinthu zomwe filimu yopyapyala idzayikidwapo. Amayikidwanso mkati mwa chipinda chounikira.
4.Plasma Generation: Mpweya wa inert, makamaka argon, umalowetsedwa m'chipinda. Mpweya wochuluka umagwiritsidwa ntchito pa chandamale, kupanga plasma (chinthu chomwe chimakhala ndi ma electron ndi ayoni).
5.Sputtering: Ma ion ochokera ku plasma amawombana ndi zomwe mukufuna, ndikugwetsa maatomu kapena mamolekyu kuchoka pa chandamale. Tinthu ting'onoting'ono timeneti timadutsa mu vacuum ndikuyika pa gawo lapansi, ndikupanga filimu yopyapyala.
6.Control: Makulidwe ndi mapangidwe a filimuyo amatha kuyendetsedwa bwino ndi kusintha magawo monga mphamvu yomwe imagwiritsidwa ntchito pa chandamale, kupanikizika kwa mpweya wa inert, ndi nthawi ya sputtering.
-Nkhaniyi yatulutsidwa ndiwopanga makina opangira vacuumGuangdong Zhenhua
Nthawi yotumiza: Jul-12-2024