Ko te ahunga o te whanaketanga hangarau pūtau kirikiri kiriata kei roto ano te hangarau PERT me te hangarau Topcon, ko enei hangarau e rua e kiia ana he toronga o te hangarau o te tikanga whakamaarama tuku iho, ko o raatau ahuatanga ko te paparanga passivation i te taha o muri o te pūtau, me te whakamahi i te paparanga o te poly silicon doped hei tuara o muri, ko te nuinga o te kura e whakamahia ana i roto i te paparanga oxidized teitei-mahana, me te doped polycond me te paparanga LPCD me etahi atu. Ko te PECVD Tubular me te Tubular PECVD me te PECVD pereti papatahi kua whakamahia i roto i te hanga papatipu nui o nga pūtau PERC.
He nui te kaha o te Tubular PECVD, a, i te nuinga o te waa ka tango i te tuku hiko iti-auau o te maha tekau o kHz. Ka pa ki te kounga o te paparanga katoo me te karo i nga raru whakakikorua. Ko te pereti papatahi PECVD karekau he raru o te whakakikorua, a he nui ake te painga ki te whakakikorua i nga mahi, ka taea te whakamahi mo te tuunga o nga kiriata Doped Si, Si0X, SiCX. Ko te kino ko te kiriata whakakikoruatia he nui te hauwai, he ngawari ki te pupuhi o te paparanga kiriata, he iti te matotoru o te paninga. Hangarau whakakikorua lpcvd te whakamahi i te paninga oumu ngongo, me te kaha nui, ka taea te whakatakoto i te kiriata polysilicon matotoru, engari ka huri noa i te whakakikorua ka puta, i roto i te tukanga lpcvd i muri i te tangohanga o te whakakikorua o te paparanga kiriata me te kore e whara i te paparanga o raro. Ko nga pūtau Topcon i hangaia e te papatipu kua eke ki te 23%.
——Namīhini whakakikorua māruaGuangdong Zhenhua
Te wa tuku: Sep-22-2023