Ihe mkpuchi oghere na-efesa bụ ngwaọrụ eji etinye ihe nkiri ndị dị mkpa n'ime mkpụrụ. A na-ejikarị usoro a eme ihe na mmepụta nke semiconductors, sel anyanwụ, na ụdị mkpuchi dị iche iche maka ngwa anya na ngwa eletrọnịkị. Nke a bụ ntụle nkiti maka otu o si arụ ọrụ:
1.Vacuum Chamber: Usoro a na-eme n'ime oghere oghere iji belata mmetọ ma nye ohere ka mma ịchịkwa usoro ntinye.
2.Target Material: A na-akpọ ihe a ga-edebe dị ka ihe mgbaru ọsọ. A na-etinye nke a n'ime oghere oghere.
3.Substrate: Mkpụrụ ahụ bụ ihe a ga-etinye ihe nkiri dị mkpa na ya. A na-etinyekwa ya n'ime oghere oghere.
4.Plasma Generation: A na-ewebata gas inert, nke na-abụkarị argon, n'ime ụlọ. A na-etinye voltaji dị elu na ebumnuche, na-emepụta plasma (ọnọdụ nke ihe mejupụtara electrons na ion n'efu).
5.Sputtering: Ions sitere na plasma na-ejikọta ihe a na-achọsi ike, na-akụtu atom ma ọ bụ molecules pụọ na ebumnuche. Ihe ndị a na-agafe na oghere ahụ wee tinye na mkpụrụ osisi ahụ, na-akpụ ihe nkiri dị mkpa.
6.Control: Ọkpụkpụ na ihe mejupụtara ihe nkiri ahụ nwere ike ịchịkwa nke ọma site n'ịgbanwe usoro dị ka ike etinyere na ebumnuche, nrụgide nke gas inert, na oge nke usoro mgbasa ozi.
–E wepụtara akụkọ aonye na-emepụta igwe mkpuchi ikukuGuangdong Zhenhua
Oge nzipu: Jul-12-2024