Nrog rau kev loj hlob ntawm sputtering txheej tshuab, tshwj xeeb tshaj yog magnetron sputtering txheej tshuab, tam sim no, rau txhua yam khoom yuav tsum tau npaj los ntawm ion bombardment phiaj zaj duab xis, vim hais tias lub hom phiaj yog sputtered nyob rau hauv tus txheej txheem ntawm txheej nws mus rau ib co substrate, qhov zoo ntawm sputtered zaj duab xis muaj ib qho tseem ceeb heev cuam tshuam, yog li ntawd, qhov yuav tsum tau ntawm lub hom phiaj cov ntaub ntawv tseem yog nruj dua. Hauv kev xaiv cov khoom siv, ntxiv rau kev siv cov yeeb yaj kiab nws tus kheej yuav tsum tau xaiv, yuav tsum tau xav txog cov teeb meem hauv qab no:
1. Cov khoom siv lub hom phiaj yuav tsum muaj lub zog zoo txhua yam thiab tshuaj lom neeg ruaj khov tom qab tsim cov yeeb yaj kiab
2. Lub hom phiaj thiab substrate ua ke yuav tsum muaj zog, txwv tsis pub yuav tsum tau coj mus rau hauv lub substrate muaj ib tug zoo ua ke ntawm membrane cov ntaub ntawv, ua ntej sputtering ib puag ncig zaj duab xis thiab ces qhov kev npaj ntawm yuav tsum tau membrane txheej.
3 raws li cov tshuaj tiv thaiv sputtering membrane cov ntaub ntawv yuav tsum yooj yim rau react nrog cov roj los tsim cov compound membrane; 4.
4. Raws li qhov ua tau raws li qhov yuav tsum tau ua ntawm daim nyias nyias, qhov sib txawv ntawm cov coefficient ntawm thermal expansion ntawm lub hom phiaj ntawm cov khoom siv thiab cov substrate yog me me raws li qhov ua tau, kom txo qis cov nyhuv ntawm thermal stress ntawm sputtered membrane.
Kev cuam tshuam ntawm thermal stress ntawm sputtering zaj duab xis; 5.
5. Raws li kev siv thiab kev ua haujlwm ntawm daim nyias nyias, lub hom phiaj cov khoom yuav tsum ua kom tau raws li cov ntsiab lus purity, impurity cov ntsiab lus, cov khoom sib xws, kev ua haujlwm raug thiab lwm yam kev cai.
– Zaj lus no yog tso tawm los ntawmtshuab nqus tsev txheej tshuab manufacturersGuangdong Zhenhua
Post lub sij hawm: Dec-21-2023

