Cov txheej txheem ua haujlwm ntawm cov khoom siv txheej txheem feem ntau suav nrog cov kauj ruam tseem ceeb hauv qab no: kev kho ua ntej, txheej, kev saib xyuas thiab kho cov yeeb yaj kiab, txias thiab tshem tawm. Cov txheej txheem tshwj xeeb yuav txawv nyob ntawm hom khoom siv (xws li cov txheej txheej evaporation, cov txheej txheej sputtering, thiab lwm yam) thiab cov txheej txheem txheej (xws li cov yeeb yaj kiab ib txheej, cov yeeb yaj kiab ntau txheej, thiab lwm yam), tab sis feem ntau, cov txheej txheem ntawm cov txheej txheem txheej txheem yog kwv yees li hauv qab no:
Ua ntej, theem npaj
Kev ntxuav thiab npaj cov khoom siv kho qhov muag:
Ua ntej txheej, cov khoom siv kho qhov muag (xws li cov iav tsom iav, cov lim dej, iav kho qhov muag, thiab lwm yam) yuav tsum tau ntxuav kom huv si. Cov kauj ruam no yog lub hauv paus rau kev ua kom zoo ntawm cov txheej. Cov txheej txheem ntxuav feem ntau suav nrog kev ntxuav ultrasonic, pickling, kev ntxuav nrog pa thiab lwm yam.
Cov khoom siv kho qhov muag huv si feem ntau muab tso rau ntawm lub cuab yeej tig lossis lub kaw lus clamping ntawm lub tshuab txheej kom ntseeg tau tias lawv tuaj yeem ruaj khov thaum lub sijhawm txheej txheem.
Kev kho ua ntej ntawm lub tshuab nqus tsev:
Ua ntej muab cov khoom siv kho qhov muag tso rau hauv lub tshuab txheej, lub chamber txheej yuav tsum tau nqus mus rau qee qib ntawm lub tshuab nqus tsev. Qhov chaw nqus tsev tuaj yeem tshem tawm cov khoom tsis huv, cov pa oxygen thiab cov pa dej hauv huab cua, tiv thaiv lawv kom tsis txhob cuam tshuam nrog cov khoom siv txheej, thiab xyuas kom meej tias zaj duab xis huv thiab zoo.
Feem ntau, lub chamber txheej yuav tsum ua tiav qhov nqus tsev siab (10⁻⁵ txog 10⁻⁶ Pa) lossis qhov nqus tsev nruab nrab (10⁻³ txog 10⁻⁴ Pa).
Qhov thib ob, cov txheej txheem txheej txheem
Pib txheej txheem:
Feem ntau cov txheej txheem yog cov dej ua pa lossis cov dej tawg. Cov txheej txheem sib txawv yuav raug xaiv raws li cov txheej txheem txheej thiab cov khoom siv.
Qhov chaw ua kom qhuav: Cov khoom siv txheej yog cua sov rau lub xeev ua kom qhuav siv cov khoom siv cua sov, xws li lub tshuab hluav taws xob lossis lub tshuab ua kom sov tsis kam, kom nws cov molecules lossis atoms ua kom qhuav thiab tso rau ntawm qhov chaw ntawm cov khoom siv kho qhov muag hauv lub tshuab nqus tsev.
Qhov chaw sputtering: Los ntawm kev siv lub zog siab, lub hom phiaj sib tsoo nrog cov ions, sputtering tawm cov atoms lossis molecules ntawm lub hom phiaj, uas tau tso rau ntawm qhov chaw ntawm lub teeb pom kev zoo los ua ib zaj duab xis.
Kev tso cov khoom siv zaj duab xis:
Hauv ib puag ncig nqus tsev, cov khoom siv coated yuav ua pa lossis sputters los ntawm ib qho chaw (xws li qhov chaw ua pa lossis lub hom phiaj) thiab maj mam tso rau ntawm qhov chaw ntawm cov khoom siv optical.
Yuav tsum tswj tus nqi tso tawm thiab tuab ntawm zaj duab xis kom meej kom ntseeg tau tias cov txheej zaj duab xis sib xws, txuas ntxiv mus, thiab ua tau raws li qhov yuav tsum tau tsim. Cov kev ntsuas thaum tso tawm (xws li tam sim no, roj ntws, kub, thiab lwm yam) yuav cuam tshuam ncaj qha rau qhov zoo ntawm zaj duab xis.
Kev saib xyuas zaj duab xis thiab kev tswj qhov tuab:
Hauv cov txheej txheem txheej, qhov tuab thiab zoo ntawm zaj duab xis feem ntau raug saib xyuas lub sijhawm tiag tiag, thiab cov cuab yeej saib xyuas feem ntau yog quartz crystal microbalance (QCM) ** thiab lwm yam sensors, uas tuaj yeem ntes tau qhov nrawm thiab tuab ntawm zaj duab xis.
Raws li cov ntaub ntawv saib xyuas no, lub kaw lus tuaj yeem hloov kho cov yam ntxwv xws li lub zog ntawm qhov chaw txheej, qhov roj ntws lossis qhov ceev ntawm kev sib hloov ntawm cov khoom kom tswj tau qhov sib xws thiab sib xws ntawm cov txheej zaj duab xis.
Zaj duab xis ntau txheej (yog tias xav tau):
Rau cov khoom siv kho qhov muag uas xav tau cov qauv ntau txheej, cov txheej txheem txheej feem ntau yog ua tiav ib txheej dhau ib txheej. Tom qab tso txhua txheej, lub kaw lus yuav ua qhov kev kuaj xyuas thiab kho qhov tuab ntawm zaj duab xis dua kom ntseeg tau tias qhov zoo ntawm txhua txheej ntawm zaj duab xis ua tau raws li qhov yuav tsum tau tsim.
Cov txheej txheem no yuav tsum tau tswj hwm qhov tuab thiab hom khoom ntawm txhua txheej kom ntseeg tau tias txhua txheej tuaj yeem ua haujlwm xws li kev cuam tshuam, kev sib kis lossis kev cuam tshuam hauv qhov ntau thiab tsawg ntawm qhov ntev.
Qhov thib peb, txias thiab tshem tawm
CD:
Tom qab ua tiav cov txheej txheem pleev xim, cov khoom siv kho qhov muag thiab lub tshuab pleev xim yuav tsum tau txias. Vim tias cov khoom siv thiab cov khoom sib xyaw tuaj yeem kub thaum lub sijhawm pleev xim, lawv yuav tsum tau txias rau qhov kub hauv chav los ntawm lub kaw lus txias, xws li dej txias lossis cua ntws, kom tiv thaiv kev puas tsuaj los ntawm cua sov.
Hauv qee cov txheej txheem txheej txheem kub siab, kev txias tsis yog tsuas yog tiv thaiv cov khoom siv kho qhov muag xwb, tab sis kuj tseem ua rau cov zaj duab xis ua tiav qhov kev nplaum zoo tshaj plaws thiab ruaj khov.
Tshem tawm cov khoom siv kho qhov muag:
Tom qab txias tiav lawm, cov khoom siv kho qhov muag tuaj yeem raug tshem tawm ntawm lub tshuab txheej.
Ua ntej muab tshem tawm, nws yog ib qho tsim nyog los xyuas cov nyhuv ntawm txheej, suav nrog qhov sib xws ntawm cov txheej zaj duab xis, cov tuab zaj duab xis, kev nplaum, thiab lwm yam, kom ntseeg tau tias qhov zoo ntawm txheej ua tau raws li qhov yuav tsum tau ua.
4. Kev ua tiav tom qab (xaiv tau)
Zaj duab xis tawv:
Qee zaum cov zaj duab xis uas tau coated yuav tsum tau ua kom tawv kom zoo dua qub kom tiv taus khawb thiab ua tau ntev. Qhov no feem ntau ua los ntawm kev kho cua sov lossis kev siv hluav taws xob ultraviolet.
Kev ntxuav zaj duab xis:
Yuav kom tshem tawm cov kuab paug, roj lossis lwm yam tsis huv ntawm qhov chaw ntawm zaj duab xis, nws yuav tsum tau ua kev ntxuav me me, xws li kev ntxuav, kev kho ultrasonic, thiab lwm yam.
5. Kev tshuaj xyuas thiab kev sim zoo
Kev ntsuam xyuas kev ua tau zoo ntawm qhov muag: Tom qab ua tiav cov txheej txheem, ntau qhov kev ntsuam xyuas kev ua tau zoo raug ua tiav rau ntawm cov khoom siv kho qhov muag, suav nrog kev xa hluav taws xob, kev cuam tshuam, kev sib xws ntawm zaj duab xis, thiab lwm yam, kom ntseeg tau tias nws ua tau raws li cov kev cai.
Kev sim nplaum: Los ntawm kev sim daim kab xev lossis kev sim khawb, xyuas seb qhov nplaum ntawm zaj duab xis thiab lub substrate puas muaj zog.
Kev ntsuam xyuas kev ruaj khov ib puag ncig: Qee zaum nws yog qhov tsim nyog los ua qhov kev ntsuam xyuas kev ruaj khov nyob rau hauv cov xwm txheej ib puag ncig xws li qhov kub thiab txias, av noo, thiab lub teeb ultraviolet kom ntseeg tau tias muaj kev ntseeg siab ntawm cov txheej txheej hauv kev siv tiag tiag.
– Tsab xov xwm no yog tso tawm los ntawmlub tshuab nqus tsev txheej tshuab chaw tsim khoomGuangdong Zhenhua
Lub sijhawm tshaj tawm: Lub Ib Hlis-24-2025