Na'urar da ke zubar da ruwa ita ce na'urar da ake amfani da ita don saka siraran fina-finai na abu a kan wani abu. Ana amfani da wannan tsari sosai wajen samar da semiconductor, ƙwayoyin hasken rana, da nau'ikan sutura daban-daban don aikace-aikacen gani da lantarki. Anan ga ainihin bayanin yadda yake aiki:
1.Vacuum Chamber: Tsarin yana faruwa a cikin ɗakin daki don rage gurɓatawa kuma ya ba da damar mafi kyawun sarrafawa akan tsarin ajiya.
2.Target Material: Kayan da za a ajiye shi an san shi da manufa. Ana sanya wannan a cikin ɗakin datti.
3.Substrate: Substrate shine kayan da za a ajiye fim din bakin ciki. Ana kuma sanya shi a cikin ɗakin datti.
4.Plasma Generation: An shigar da iskar gas marar aiki, yawanci argon, a cikin ɗakin. Ana amfani da babban ƙarfin lantarki akan manufa, ƙirƙirar plasma (yanayin kwayoyin halitta wanda ya ƙunshi electrons da ions kyauta).
5.Sputtering: Ions daga plasma sun yi karo da kayan da aka yi niyya, suna buga atom ko kwayoyin daga abin da aka nufa. Wadannan barbashi sai suyi tafiya ta cikin injin kuma su ajiye a kan ma'auni, suna yin fim na bakin ciki.
6.Control: Za'a iya sarrafa kauri da abun da ke ciki na fim ɗin daidai ta hanyar daidaita ma'auni kamar ikon da aka yi amfani da shi ga manufa, matsa lamba na inert gas, da kuma tsawon lokacin aikin sputtering.
–An fitar da wannan labarininjin shafa injin injinGuangdong Zhenhua
Lokacin aikawa: Jul-12-2024