Kungani Umbala Uphela Ngemva Kokumboza Nge-Vacuum?

— Ukuhlaziywa Okuhlelekile Kusukela Esakhiweni Sefilimu Kuya Ekulawulweni Kwezinqubo

1. Kusho ukuthini ngempela ukuthi “Ukuphela Kombala Ngemva Kokumboza”?

Ku-imboni yokumboza nge-vacuum, ukufiphala kombala akukhona nje ukushintsha kombala okubonakalayo. Ngokuvamile kubonakala kanje:

Ukonakala kombala kancane kancane noma ukushintsha ngokuhamba kwesikhathi

Ukuphambuka kombala ngemva komswakama, ukuguga kokushisa, noma ukuhlolwa kokuvezwa yi-UV

Ukushintsha kombala wendawo, ukuba mpunga, noma ukulahlekelwa ukukhazimula kwensimbi

Ngokuyisisekelo, ukufiphala kombala akubangelwa umbala ongazinzile ngokwawo, kodwa ukwehluleka kwesakhiwo, izinto, noma okuhlobene nenqubo ngaphakathi kohlelo lokumboza.

2. Izimbangela Eziyinhloko Zokuphela Kombala Ngemva Kokumboza Nge-Vacuum
2.1 Ubuningi befilimu obunganele obuholela ekufakweni kwe-oksijini noma ekungeneni komswakama

Ngesikhathi sokuhwamuka kwe-PVD noma ukuchitheka kwe-magnetron, amandla okufaka anganele noma ubuningi obuphansi be-plasma kungabangela isakhiwo sokukhula kwekholomu esinezimbobo eziphezulu.

Amafilimu anjalo avame ukuba:

Ukusabalala komoya-mpilo kanye nomswakama emingceleni yokusanhlamvu

Ukubola noma ukugqwala kwengqimba yensimbi

Ukuguqulwa kwezimo zokuphazamiseka kokukhanya

Lokhu ekugcineni kuholela ekuwohlokeni kombala noma ekuphendukeni.

2.2 Ukukhethwa Okungalungile Kwezinhlelo Zezinto Zokumboza

Izinto zokumboza ezahlukene zibonisa ukuzinza kwemvelo okuhluke kakhulu:

Amafilimu ensimbi ahlanzekile (isb., i-Al, i-Cr) asengozini enkulu yokushiswa yi-oxidation ngaphandle kwezingqimba zokuvikela

Izinsimbi ezithile ezinemibala noma ama-alloy azwela ezindaweni ezinomswakama nezishisayo

Ukukhukhuleka kwenkomba ye-Refractive ezingqimbeni ze-dielectric kubangela ngqo ukuhlukahluka kombala

Ngaphandle kwesendlalelo sensimbi esakhiwe kahle + isakhiwo sesendlalelo sokuvikela i-dielectric, ingozi yokushabalala kombala iyanda kakhulu.

2.3 Ukulawulwa Okungafanele Kokujiya Kwefilimu kanye Nokuphazamiseka Kokuphazamiseka

Imibala yokumboza ehlobisayo nesebenzayo ivame ukukhiqizwa yimiphumela yokuphazamiseka kokukhanya, ezwela kakhulu ekujiyeni kwefilimu.

Izinkinga ezifana nalezi:

Ukuzulazula kwe-quartz crystal monitor noma indawo engafanele yenzwa

Ukushintshashintsha kwezinga lokufakwa kwemali

Ukujikeleza noma ukuvikela i-substrate okungalingani

kungabangela ukuphambuka kobukhulu, okuholela ekushintsheni kombala kanye nokungahambisani kweqoqo.

2.4 Ukunamathela Okwanele Okubangela Ukuqhekeka Okuncane

Uma ukuhlanzwa kwe-substrate kunganele, noma ukwelashwa kwangaphambili kwe-plasma kanye nokusebenza okusizwa yi-ion kunganele, ukunamathelana phakathi kwefilimu ne-substrate kungaba buthakathaka.

Ngaphansi kokujikeleza kokushisa, ukucindezeleka komshini, noma ukuguga kwemvelo, kungase kube nokuqhekeka okuncane noma ukususwa kwendawo, okubonakala ngokubonakalayo njengokuphela kombala noma ukungalingani.

2.5 Ukuntuleka Komklamo Wezingqimba Ezivikelayo Ophumelelayo

Ezindaweni zangaphakathi zezimoto, ekukhanyeni, noma ezindaweni ezinomswakama ophezulu, ukungabikho kwalokhu:

Izendlalelo zokuvikela ze-dielectric eziminyene njenge-SiO₂ noma i-SiNx

Izembozo eziphezulu ezilwa nokunyathelisa iminwe (AF) noma ezingagugi

iveza ifilimu ngqo ekuhlaselweni kwemvelo, isheshisa ukuguga kanye nokunyamalala kombala.

3. Izixazululo Zobunjiniyela Zokuvimbela Ukuphela Kombala
3.1 Ukuthuthukisa Amandla Okubeka kanye Nobuningi Befilimu

Ngokwenza ngcono:

Ubuningi bamandla okukhipha i-Magnetron

Amapharamitha okufakwa kwe-ion okusizwa yi-ion (IAD)

Ukubandlulula kwe-substrate kanye nokushisa

Ukuqina kwefilimu kungathuthukiswa kakhulu, kucindezele ngempumelelo ukungena kwe-oxidation kanye nomswakama.

3.2 Ukuthuthukisa Umklamo Wesitaki Sokumboza

Ukwamukela izendlalelo ezibonisa insimbi ezihlanganiswe nezakhiwo zokuvikela i-dielectric ezinezingqimba eziningi kuqinisekisa kokubili ukusebenza okubonakalayo kanye nokuzinza kwemvelo kwesikhathi eside.

3.3 Ukusebenzisa Ukuqapha Nokulawula Ubukhulu Be-Closed-Loop

Izinhlelo zokuqapha amakristalu e-Quartz ezihlanganiswe nama-algorithms okulawula i-closed-loop aqinisekisa ukuphindaphindeka kobukhulu obuphezulu kanye nokuvumelana kwe-batch-to-batch.

3.4 Ukuqinisa Ukwelashwa Kwangaphambi Kokuphezulu kanye Nobunjiniyela Bokuxhumana

Ukuhlanzwa kwe-plasma kanye nokusebenza kwe-ion bombardment kuthuthukisa amandla okubopha phakathi kwe-coating kanye ne-substrate.

4. Isiphetho

Ukuphela kombala ngemva kokugqoka nge-vacuum akuvamile ukubangelwa yiphutha elilodwa lepharamitha. Kungumphumela wokwehluleka kwezinga lesistimu okubandakanya ukukhethwa kwezinto, ukwakheka kwesitaki sokugqoka, kanye nokulawulwa kwenqubo.
Kuphela ngokusebenzisa indlela yobunjiniyela obuphelele lapho ukuzinza kombala kwesikhathi eside kanye nokungaguquguquki kokukhiqiza ngobuningi kungafinyelelwa khona.

–Lesi sihloko sishicilelwe nguimishini yokumboza nge-vacuumumenzi we-Zhenhua Vacuum