Kuki ibara rishira nyuma yo gusiga irangi mu cyuma gishyushye?

— Isesengura ry’Uburyo Busanzwe kuva ku Miterere ya Filimi kugeza ku Igenzura ry’Imikorere

1. "Gushira kw'ibara nyuma yo gusiga irangi" bisobanura iki mu by'ukuri?

Muriinganda zikora irangi ry'ubushyuhe, gusibangana kw'amabara si uguhinduka kw'amabara gusa. Bikunze kugaragara muri ubu buryo:

Ibara rigabanuka buhoro buhoro cyangwa rigahinduka uko igihe kigenda gihita

Guhinduka kw'amabara nyuma y'ubushuhe, gusaza kw'ubushyuhe, cyangwa ibizamini byo kwanduzwa n'imiraba ya UV

Guhinduka ibara ry'aho hantu, imvi, cyangwa gutakaza ubwiza bw'icyuma

Mu by’ukuri, gucika kw’amabara ntibiterwa n’ibara ridahamye ubwaryo, ahubwo biterwa n’imiterere, ibikoresho, cyangwa imikorere idafite akamaro muri sisitemu yo gusiga.

2. Impamvu z'ingenzi zitera ibara gucika nyuma yo gusiga irangi mu cyuma gishyushye
2.1 Ubucucike budahagije bwa firime butuma habaho ogisijeni cyangwa ukwinjira k'ubushuhe

Mu gihe cyo guhumeka kwa PVD cyangwa gukurura magnetron, ingufu zidahagije zo gushyiramo cyangwa ubucucike buke bwa plasma bishobora gutuma imiterere y’inkuta ikura ifite porosity nyinshi.

Filime nk'izo zikunze kugaragara muri ibi bikurikira:

Ogisijeni n'ubushuhe bikwirakwira ku mbibi z'ingano

Kugwa cyangwa kwangirika k'urwego rw'icyuma

Ihinduka ry'imiterere y'urumuri rw'amaso

Ibi amaherezo biganisha ku kwangirika cyangwa guhindagurika kw'amabara.

2.2 Guhitamo nabi ibikoresho byo gusiga

Ibikoresho bitandukanye byo gusiga bigaragaza uburyo ibidukikije bihagaze neza bitandukanye cyane:

Filimi z'icyuma cy'umwimerere (urugero, Al, Cr) zishobora kwangirika cyane zidafite urwego rurinda

Ibyuma bimwe na bimwe cyangwa aloyi z'amabara bikunze kwangirika mu bidukikije bitose kandi bishyuha

Ihindagurika ry'ibara rya refractive index mu byiciro bya dielectric ritera ihinduka ry'amabara mu buryo butaziguye

Hatabayeho urwego rw'icyuma rwakozwe neza + imiterere y'urwego rwo kurinda dielectric, ibyago byo gutakaza amabara byiyongera cyane.

2.3 Kudakora neza mu kugenzura ubunini bwa filime no kutagira aho bihurira n'ihungabana

Amabara yo gusiga imitako n'imikorere yayo akunze guterwa n'ingaruka z'urumuri rw'amatara, zituma umuntu yumva cyane ubugari bwa firime.

Ibibazo nka:

Quartz crystal monitor drift cyangwa serivise idakwiye yo gushyiramo sensor

Ihindagurika ry'igipimo cyo gusohora amafaranga

Guhindura cyangwa gukingira ibintu mu buryo butari bumwe

bishobora gutuma ubugari buhindagurika, bigatera ihinduka ry'amabara no kudahuza kw'amabara.

2.4 Gufata neza bidahagije bitera kwangirika kwa mikorobe

Niba gusukura substrate bidahagije, cyangwa uburyo bwo kuvura mbere yo gukoresha plasma no gukoresha ion bugafasha kuyikoresha bidahagije, gufatana hagati ya filime na substrate bishobora kuba bidakomeye.

Mu gihe cy'ubushyuhe, stress ya mekanike, cyangwa gusaza kw'ibidukikije, hashobora kubaho uduce duto cyangwa disamination y'ahantu runaka, bigaragara nk'ibara ritagenda neza cyangwa ritameze neza.

2.5 Kutagira imiterere myiza y'urwego rurinda

Mu modoka imbere, mu matara, cyangwa mu bintu birimo ubushuhe bwinshi, nta:

Uduce twinshi tw’uburinzi bwa dielectric nka SiO₂ cyangwa SiNx

Irangi rirwanya ibimenyetso by'urutoki (AF) cyangwa irangi ririnda kwangirika

ishyira iyo filime mu buryo butaziguye ku bidukikije, yihutisha gusaza no gucika kw'amabara.

3. Ibisubizo by'Ubuhanga mu Kurinda Gushira kw'Amabara
3.1 Kongera ingufu zo gushyira mu bikorwa filime n'ubucucike bwayo

Mu kunoza:

Ubucucike bw'ingufu za Magnetron

Ibipimo byo gupima ion-assisted Ion (IAD)

Ubushyuhe n'ubushyuhe bya substrate

Ubucucike bwa firime bushobora kunozwa cyane, bigahagarika neza ogisijeni n'ubwinjirire bw'ubushuhe.

3.2 Kunoza igishushanyo mbonera cy'ibice byo gusiga

Gukoresha ibyuma bigarura urumuri bivanze n'imiterere y'uburinzi bwa dielectric ifite urwego rwinshi bitanga umusaruro mwiza kandi bigakomeza kubungabunga ibidukikije mu gihe kirekire.

3.3 Gushyira mu bikorwa igenzura n'igenzura ry'ubugari bw'imirongo ifunze

Sisitemu zo kugenzura kristalo ya Quartz zihujwe na algorithme zo kugenzura zifunganye zituma ubugari busubiramo kandi zigahuza imiterere.

3.4 Gukomeza Uburyo bwo Gutunganya Ubuso Mbere yo Gutunganya no Gutunganya Interface

Gusukura plasma no gukoresha ion bombardment byongera imbaraga zo guhuza hagati y’igitambaro n’icyatsi.

4. Umwanzuro

Gushira kw'amabara nyuma yo gusiga irangi mu buryo bwa vacuum ntibikunze guterwa n'ikosa rimwe rya parameter. Ni ingaruka z'ibibazo byo ku rwego rwa sisitemu birimo guhitamo ibikoresho, imiterere y'udukingirizo tw'irangi, no kugenzura uburyo ibintu bikorwamo.
Ku bw'uburyo bw'ikoranabuhanga buhuriweho gusa, ni bwo buryo bwo gutuma amabara adahindagurika kandi agakorwa neza mu buryo burambye.

–Iyi nkuru yasohotse naibikoresho byo gusiga irangi ry'umwukauruganda rwa Zhenhua Vacuum