Phakathi kuUhlelo Lokumboza Nge-Vacuum, Uhlelo Lokupholisa luyiyunithi eyisizayo ebaluleke kakhulu. Kungakhathaliseki ukuthi kusekuhwamukeni Okushisayo, ekuqhumeni kwe-Magnetron, noma ezinqubweni ze-CVD, okuqondiwe, okungaphansi komhlaba, kanye nezingxenye zegumbi kufakwa ekushiseni okukhulu ngaphansi kokuqhunyiswa kwemisebe enamandla aphezulu. Ngaphandle kokuphathwa kokushisa okuphumelelayo, ikhwalithi yefilimu ayigcini nje ngokuwohloka, kodwa nomonakalo wemishini kanye nokuphazamiseka kokukhiqiza nakho kungenzeka.
I. Kungani Izinhlelo Zokumboza Nge-Vacuum Zidinga Ukupholisa?
Ngesikhathi sezinqubo zokumboza, imithombo eyinhloko yokushisa ihlanganisa:
Ukuqhuma Okuqondiwe: Ekuqhumeni kwe-magnetron, ukuqhuma kwe-ion kwethagethi kukhiqiza ukushisa okukhulu.
Ukushisa nge-Plasma: Amandla akhishwa ngesikhathi sokukhishwa kwe-plasma aholela ekufudumaleni kwendawo ngaphakathi kwegumbi.
Ukushisa Okungaphansi: Amandla adluliselwa endaweni yokusebenza ngesikhathi sokufakwa kwefilimu abangela ukwanda kokushisa noma ukuguqulwa kwendawo.
Ukulahlekelwa Yiphampu Nogesi: Amaphampu anamandla amakhulu kanye nezinsiza zikagesi zikhiqiza imithwalo yokushisa eyengeziwe.
Uma ukushisa kunganyamalali ngesikhathi, kungaholela ku:
Ukukhula kwefilimu okunezimbobo, ukuncipha kobuningi befilimu.
Ukuguqulwa kwe-substrate kanye nokulahlekelwa kokunemba kobukhulu.
Ukuguguleka okungavamile kwenhloso, okusheshisa "ukushiswa" kwenhloso.
Ukonakala kwesivalo ngaphakathi kwegumbi, okuphazamisa ukuzinza kwe-vacuum.
II. Isimiso Sokusebenza Sezinhlelo Zokupholisa
Izinhlelo zokumboza nge-vacuum zivame ukusebenzisa ukupholisa amanzi okuvalekile, kuyilapho eminye imishini enembile kakhulu ihlanganisa nokupholisa uwoyela noma izithiyo ze-cryogenic. Izindlela eziyisisekelo zifaka:
Ukuqhuba: Ukushisa kudluliselwa ngepuleti elingemuva eliqondiwe, isibambi se-substrate, kanye namajakethi okupholisa.
Ukuguqulwa kwe-Convection: Isibandisi esijikelezayo sisusa ukushisa ezingxenyeni ezishisayo.
Ukushintshaniswa Kokushisa: Ama-plate heat exchanger noma imibhoshongo yokupholisa adlulisela umthwalo wokushisa endaweni yangaphandle, okuqinisekisa ukulawulwa kokushisa okuqhubekayo.
III. Izindima Eziyinhloko Zohlelo Lokupholisam
Ukugcina Ikhwalithi Yefilimu
Ukushisa okuzinzile kuvimbela ukwakheka kwekristalu okungavamile kanye nokukhukhuleka kokukhanya, okuqinisekisa ukufana kwefilimu kanye nokunamathela okuqinile.
Ukwandisa Isikhathi Sokuphila Kwemishini
Ivikela amakamelo okuhlanza, ama-magnetron target, kanye nezivalo ekulimaleni kokushisa.
Ukuqinisekisa Ukuphindaphindwa Kwenqubo
Ukupholisa okuzinzile kubalulekile ukuze kube nokuvumelana kweqembu ngalinye.
Ukusekela Izinqubo Ezinamandla Aphezulu
Ngezinqubo ze-magnetron sputtering noma ze-CVD zesikhathi eside, ukupholisa kuyisisekelo sokukhiqiza okungaphazanyiswa.
IV. Izinto Ezibalulekile Zokunakekela
Ukuphathwa Kwekhwalithi Yamanzi: Sebenzisa amanzi angenawo ama-ion (amanzi e-DI) ukuvimbela ukwakheka kwezikali kanye nokungcola kwe-ionic.
Ukuqapha Ukugeleza Nokucindezela: Qinisekisa ukusebenza kahle kokupholisa okwanele ezindaweni ezihlosiwe kanye nezinto ezisetshenziswa ngaphansi komhlaba.
Ukuhlanza i-Heat Exchanger: Gcina ukusebenza kokupholisa ngokuvimbela ukuvaleka kwezinhlayiya.
Ukuhlanganiswa Kokulawula Izinga Lokushisa: Xhumana nezinhlelo ze-PLC zama-alamu okushisa ngokweqile kanye nokuvikelwa kokuvala okuzenzakalelayo.
Isiphetho
Emishinini yokumboza nge-vacuum, uhlelo lokupholisa aluyona into esetshenziswayo kodwa luyisivikelo esiyinhloko sokuqina kwenqubo, isivuno somkhiqizo, kanye nokuphila isikhathi eside kwemishini. Kuphela ngokuklama okupholisayo okuqinile kanye nokugcinwa okujwayelekile lapho izinqubo zokubeka amandla aphezulu zingasebenza ngaphansi kwamazinga okushisa alawulwayo, ziletha njalo amafilimu amancane asezingeni eliphezulu.
—Lesi sihloko sishicilelwe nguimishini yokumboza nge-vacuumumenzi we-Zhenhua Vacuum
Isikhathi sokuthunyelwe: Septhemba-10-2025