KwiInkqubo Yokugquma Umshini, iNkqubo yokuPholisa yiyunithi encedisayo eyimfuneko. Nokuba kwi-Thermal Evaporation, kwi-Magnetron Sputtering, okanye kwiinkqubo ze-CVD, ithagethi, i-substrate, kunye neenxalenye zegumbi zitshiswa kakhulu phantsi kokuqhushumba kwe-bombardment enamandla aphezulu. Ngaphandle kolawulo olufanelekileyo lobushushu, umgangatho wefilimu awupheleli nje ekuwohlokeni, kodwa nomonakalo wezixhobo kunye nokuphazamiseka kwemveliso kunokwenzeka.
I. Kutheni le nto iinkqubo zokugquma i-vacuum zifuna ukuphola?
Ngexesha leenkqubo zokugquma, imithombo ephambili yobushushu ibandakanya:
Ukuqhushumba okujoliswe kuko: Kwi-magnetron sputtering, ukuqhushumba kwee-ion ze-target kuvelisa ubushushu obuninzi.
Ukufudumeza ngePlasma: Amandla akhutshwayo ngexesha lokukhupha iplasma akhokelela ekufudumaleni okungaphakathi kwigumbi.
Ukufudumeza okungaphantsi komhlaba: Amandla adluliselwa kwindawo yokusebenza ngexesha lokufakwa kwefilimu abangela ukwanda kobushushu okanye ukuguqulwa komphezulu.
Ukulahleka kweMpompo kunye noMbane: Iimpompo ezinamandla aphezulu kunye nezixhobo zombane zivelisa imithwalo yobushushu eyongezelelweyo.
Ukuba ubushushu abunyamalali ngexesha, kunokukhokelela ku:
Ukukhula kwefilimu eneembobo, uxinano lwefilimu olunciphileyo.
Ukuguquguquka kwe-substrate kunye nokulahleka kokuchaneka kobukhulu.
Ukukhukuliseka okungaqhelekanga kwento ekujoliswe kuyo, okukhawulezisa "ukutshiswa" kwento ekujoliswe kuyo.
Ukuwohloka kwesiciko ngaphakathi kwigumbi, okuphazamisa uzinzo lwe-vacuum.
II. Umgaqo-nkqubo Wokusebenza Weenkqubo Zokupholisa
Iinkqubo zokugquma nge-vacuum zihlala zisebenzisa ukupholisa amanzi okuvaliweyo, ngelixa ezinye izixhobo ezichanekileyo zikwadibanisa ukupholisa ioyile okanye imigibe ye-cryogenic. Iindlela eziphambili ziquka:
Ukuqhuba: Ubushushu budluliselwa ngepleyiti engasemva ekujoliswe kuyo, isibambi se-substrate, kunye neejakethi zokupholisa.
Ukujikeleza: Isibandisi esijikelezayo sisusa ubushushu kwizinto ezishushu.
Utshintsho lobushushu: Iipleyiti zokutshintsha ubushushu okanye iitoweri zokupholisa zidlulisela umthwalo wobushushu kwindawo engaphandle, ziqinisekisa ulawulo lobushushu oluqhubekayo.
III. Iindima eziphambili zeNkqubo yokupholisam
Ukugcina Umgangatho Wefilimu
Ubushushu obuzinzileyo buthintela ukwakheka kwekristale okungaqhelekanga kunye nokushukuma kwe-optical, okuqinisekisa ukufana kwefilimu kunye nokunamathela okuqinileyo.
Ukwandisa Ubomi Bezixhobo
Ikhusela amagumbi okucoca umoya, iithagethi zemagnetron, kunye nezitywini kumonakalo wobushushu.
Ukuqinisekisa Ukuphindaphinda Kwenkqubo
Ukupholisa okuzinzileyo kubalulekile ukuze kubekho ukuhambelana okulinganayo phakathi kweqela.
Ukuxhasa iiNkqubo eziNamandla aphezulu
Kwinkqubo ze-magnetron sputtering ezinkulu okanye iinkqubo ze-CVD ezithatha ixesha elide, ukupholisa sisiseko semveliso engaphazanyiswa.
IV. Izinto Ezibalulekileyo Zokugcinwa
Ulawulo loMgangatho waManzi: Sebenzisa amanzi angena-ion (amanzi e-DI) ukuthintela ukwakheka kwezikali kunye nongcoliseko lwe-ion.
Ukubeka iliso kwi-flow & Pressure: Qinisekisa ukusebenza kakuhle kokupholisa kwiindawo ezijoliswe kuzo nakwizinto ezisetyenziswa kwi-substrate.
Ukucoca i-Heat Exchanger: Gcina ukusebenza kokupholisa ngokuthintela ukuvaleka kwamasuntswana.
Ukudibanisa ulawulo lobushushu: Qhagamshelanisa neenkqubo ze-PLC ukuze ufumane ii-alamu ezishushu kakhulu kunye nokukhusela ukucima ngokuzenzekelayo.
Isiphelo
Kwizixhobo zokugquma nge-vacuum, inkqubo yokupholisa ayisosincedisi esingaphandle kodwa sisixhobo sokukhusela uzinzo lwenkqubo, isivuno semveliso, kunye nobude bexesha lezixhobo. Kuphela kuyilo oluqinileyo lokupholisa kunye nokugcinwa okusemgangathweni apho iinkqubo zokubeka amandla aphezulu zinokuthi zisebenze phantsi kobushushu obulawulwayo, zinikezela rhoqo ngeefilimu ezincinci ezikumgangatho ophezulu.
—Eli nqaku lipapashwe nguizixhobo zokugquma nge-vacuumumenzi we-Zhenhua Vacuum
Ixesha leposi: Septemba-10-2025