Kubuchwepheshe bokumboza nge-vacuum, ukuba khonaamagesi asele ngaphakathi kwegumbi lokufakakungathinta kakhulu izakhiwo zesakhiwo, ezibonakalayo, kanye nezomshini zamafilimu amancane. Kungakhathaliseki ukuthi kuse-PVD, izinqubo ze-magnetron sputtering, i-ALD, noma i-PECVD, izinhlobo zegesi ezisele—kufaka phakathi umhwamuko wamanzi, umoya-mpilo, i-nitrogen, kanye nama-hydrocarbon—zisebenzisana nefilimu ekhulayo kanye nendawo ye-plasma, okuthinta i-stoichiometry yefilimu, ubuningi, ukunamathela, kanye nokusebenza kokukhanya.
Umhwamuko wamanzi osele uphakathi kwezinto ezingcolisayo ezibaluleke kakhulu. Ekubekweni kwefilimu ye-oxide noma ye-nitride, ngisho namanani amancane omswakama angaholela ekuguqulweni kwe-hydrolysis okungalawulwa noma ukusabela kwe-oxidation ebusweni be-substrate, okushintsha i-stoichiometry ehlosiwe yesendlalelo esibekiwe. Lokhu kuphumela ekwandeni kwe-porosity, ukwehla kwenkomba yokubuyisa, kanye nokubonakala okubonakalayo okonakele noma ukubuyisa. Ngokufanayo, ama-hydrocarbon angeniswa kusuka kumafutha epompo, izindonga zegumbi, noma imijikelezo yokucubungula yangaphambilini angafakwa ku-matrix yefilimu, okubangela izikhungo zokumunca, izindawo zokuhlakazeka, noma amaphutha anciphisa ukufana kwefilimu kanye nokusebenza okusebenzayo.
Ezinqubweni zokuphalaza ezisabelayo, i-oxygen noma i-nitrogen esele ingashintsha i-chemistry yendawo okuqondiwe kuyo, okuholela ekubuthisweni kwe-target. Lesi simo sishintsha isivuno se-sputter, izici ze-plasma, kanye nesilinganiso sokufakwa, okuholela ekujiyeni okungalingani, ukuhlukahluka kwe-optical constants, kanye nezakhiwo zemishini ezithintekile njengokuqina noma ukunamathela. Imiphumela ibonakala kakhulu ekumbozweni kwe-multilayer okunembe kakhulu, lapho ukuphambuka okuncane ku-refractive index noma ukumuncwa kungaphazamisa ukusebenza kwe-spectral.
Ngaphezu kwalokho, ingcindezi yegesi esele kanye nokwakheka kwayo kuthinta ukuzinza kwe-plasma kanye nokusatshalaliswa kwamandla. Ukuguquguquka kwengcindezi yegumbi kushintsha amandla e-ionization, indlela ekhululekile ephakathi, kanye namandla ezinhlayiya, okuthinta ukuqina kwefilimu, ubulukhuni bomphezulu, kanye nesakhiwo sezinhlamvu. Ukungcola kwengcindezi ephansi kunganciphisa ukusebenza kahle kokubekwa, kuyilapho ingcindezi ephezulu yengxenye yamagesi asabelayo ingasheshisa ukusabela kwamakhemikhali okungafunwa, ikhiqize amafilimu angewona ama-stoichiometric noma ikhulise ukucindezeleka kwangaphakathi.
Ukuze kuncishiswe le miphumela, izinhlelo zokufaka i-vacuum zihlanganisa ukulungiswa kwegumbi okuqinile kanye nokuqapha ngesikhathi sangempela. Ukupompa i-vacuum okuphezulu kakhulu, okuhlanganisa amaphampu e-turbomolecular kanye ne-cryogenic, kuhlanganiswe nokubhaka kwegumbi okuphelele kanye nokwelashwa kwangaphambi kwe-substrate, kunciphisa amazinga egesi asele. Abahlaziyi begesi abasele abangaphakathi (i-RGA) bahlinzeka ngempendulo eqhubekayo ngokwakheka kwegesi, okuvumela ukulawulwa okunembile kokugeleza kwegesi okusebenzayo, amapharamitha e-plasma, kanye nendawo yokubeka. Lezi zinyathelo ziqinisekisa ukuthi amafilimu amancane afinyelela ama-optical constants aklanyelwe, ubuqotho bomshini, kanye nokuzinza kwesikhathi eside.
Ngamafuphi, amagesi asele ayisici esibalulekile ekunqumeni ikhwalithi yefilimu encane ezinqubweni zokumboza nge-vacuum. Ithonya lawo lihlanganisa ukwakheka kwamakhemikhali, isakhiwo esincane, ukusebenza kokukhanya, kanye nezakhiwo zemishini. Ukulawulwa okuphumelelayo kokuqukethwe kwegesi eseleyo ngobuchwepheshe obuthuthukisiwe be-vacuum, ukuqapha inqubo, kanye nokulungiswa kwegumbi kubalulekile ukuze kufezwe ukumbozwa okuphindaphindwayo, okusebenzayo kakhulu kuzo zonke izinhlelo zokusebenza zezimboni ezahlukahlukene, kusukela ezingxenyeni zokukhanya namadivayisi okubonisa kuya kumafilimu okuvikela asebenzayo.
-Lesi sihloko sishicilelwe nguumenzi wemishini yokumboza nge-vacuumI-Zhenhua Vacuum
Isikhathi sokuthunyelwe: Mashi-10-2026