Mumichina yekuputira vacuum, kuvapo kwemagasi akasara mukati mekamuri rekuisazvinogona kukanganisa zvakanyanya chimiro, optical, uye mechanical properties yemafirimu matete. Ingava muPVD, magnetron sputtering, ALD, kana PECVD processes, magasi akasara—kusanganisira water vapor, oxygen, nitrogen, uye hydrocarbons—anoshanda pamwe chete nefirimu riri kukura uye plasma environment, zvichikanganisa stoichiometry yefirimu, density, adhesion, uye optical performance.
Mhute yemvura yasara ndeimwe yezvinhu zvinonyanya kusvibisa. Mukuisa oxide kana nitride film, kunyangwe huwandu hushoma hwehunyoro hunogona kutungamira kuhydrolysis isingadzoreki kana oxidation reactions pamusoro pe substrate, zvichichinja stoichiometry inotarisirwa ye deposited layer. Izvi zvinoguma nekuwedzera kwe porosity, kudzikira kwe refractive index, uye kuora kwe optical transparency kana reflectivity. Saizvozvowo, mahydrocarbon anounzwa kubva ku pombi oils, chamber walls, kana pre-processing cycles anogona kupinda mu film matrix, zvichikonzera absorption centers, scattering sites, kana defects dzinoderedza kufanana kwefirimu uye functional performance.
Mumaitiro e reactive sputtering, residual oxygen kana nitrogen zvinogona kuchinja makemikari epamusoro pechinhu chinotsvagwa, zvichikonzera chepfu inotsvagwa. Chiitiko ichi chinoshandura goho resputter, hunhu hweplasma, uye mwero wekuisa, zvichikonzera ukobvu husina kufanana, kusiyana kwema optical constants, uye zvikanganiso zvemakanika zvakaita sekuoma kana kunamira. Mhedzisiro yacho inonyanya kuoneka mu high-precision multilayer coatings, uko kutsauka kudiki mu refractive index kana absorption kunogona kukanganisa mashandiro e spectral.
Uyezve, kumanikidzwa kwegasi rinosara uye kuumbwa kwaro zvinopesvedzera kugadzikana kweplasma uye kugoverwa kwesimba. Kuchinja-chinja kwekumanikidzwa kwekamuri kunochinja dynamics yeionization, nzira yakasununguka, uye simba rezvikamu, zvichikanganisa density yefirimu, kuomarara kwepamusoro, uye chimiro chezviyo. Kusvibiswa kwesimba shoma kunogona kuderedza kushanda zvakanaka kwekuisa, nepo kumanikidzwa kwakanyanya kwemagasi anopindura kunogona kukurumidzisa maitiro emakemikari asingadiwe, kugadzira mafirimu asiri estoichiometric kana kuwedzera kushushikana kwemukati.
Kuti kuderedze migumisiro iyi, masisitimu ekuputira vacuum anobatanidza kugadzirira kwakasimba kwekamuri uye kutarisa panguva chaiyo. Kupomba vacuum kwakanyanya, kusanganisira mapombi e turbomolecular ne cryogenic, pamwe chete nekubika chamber zvakakwana uye pre-treatment, kunoderedza huwandu hwegasi rinosara. In-situ residual gas analyzers (RGA) inopa mhinduro inoramba ichienderera mberi pakuumbwa kwegasi, zvichibvumira kudzora kwakanyatsojeka kwe reactive gas flow, plasma parameters, uye deposition environment. Matanho aya anovimbisa kuti mafirimu matete anowana ma optical constants akagadzirwa, mechanical integrity, uye longtime stability.
Muchidimbu, magasi akasara chinhu chakakosha pakusarudza mhando yefirimu rakatetepa mumaitiro ekuputira vacuum. Simba rawo rinosanganisira kuumbwa kwemakemikari, chimiro chidiki, mashandiro ekuona, uye hunhu hwemakanika. Kudzora zvinobudirira kwehuwandu hwegasi rasara kuburikidza netekinoroji yepamusoro yevacuum, kutarisa maitiro, uye kugadzirira makamuri kwakakosha kuti pave nekuputira kunogona kudzokororwa, kushanda kwepamusoro-soro mumashandisirwo akasiyana-siyana emaindasitiri, kubva kuzvikamu zveoptical nemidziyo yekuratidza kusvika kumafirimu anodzivirira anoshanda.
-Chinyorwa ichi chakabudiswa namugadziri wemidziyo yekuputira vacuumZhenhua Vacuum
Nguva yekutumira: Kurume-10-2026