Ingaruka z'imyuka isigaye ku miterere ya firime nto mu mikorere yo gusiga ifu mu cyuma gishyushya

Mu ikoranabuhanga ryo gusiga irangi ry'umwuka mu buryo bwa vacuum, kuba hariimyuka isigaye mu cyumba cyo gushyiramo imyandabishobora kugira ingaruka zikomeye ku miterere, imiterere y'urumuri, n'imiterere ya mashini za firime nto. Byaba muri PVD, magnetron sputtering, ALD, cyangwa PECVD, ubwoko bwa gaze busigaye—harimo umwuka w'amazi, ogisijeni, azote, na hydrocarbon—bigira uruhare mu miterere ya firime ikura n'ibidukikije bya plasma, bigira ingaruka ku miterere ya firime, ubucucike, gufatana, n'imikorere y'urumuri.

Umwotsi w'amazi usigaye ni umwe mu bintu by'ingenzi cyane bihumanya. Mu gushyira icyuma cya okiside cyangwa nitride, ndetse n'ingano y'ubushuhe ishobora gutuma habaho hydrolysis idacungwa cyangwa oxidation ku buso bwa substrate, bigahindura stoichiometry yagenwe y'urwego rwabitswe. Ibi bituma habaho kwiyongera kwa porosity, kugabanuka kwa refractive index, no kwangirika kwa optical transparency cyangwa reflectivity. Mu buryo nk'ubwo, hydrocarbons zituruka mu mavuta ya pompe, inkuta z'icyumba, cyangwa imikorere yabanje ishobora kwinjira muri filime, bigatera ahantu ho kwinjiza, ahantu hakwirakwira, cyangwa inenge zigabanya imikorere ya filime n'imikorere yayo.

Mu mikorere yo gusohora amazi, ogisijeni cyangwa azote bisigaye bishobora guhindura imiterere y’ubuso bw’ikintu, bigatera uburozi bw’ikintu. Iki kintu gihindura umusaruro w’amazi, imiterere ya plasma, n’umuvuduko w’amazi, bigatuma ubunini butari bumwe, ihinduka ry’ibintu bihoraho by’urumuri, n’imiterere y’imashini yangiritse nko gukomera cyangwa gufatana. Ingaruka zigaragara cyane cyane mu mabara menshi afite imiterere ihanitse, aho kunyuranaho guto mu gipimo cya refractive cyangwa absorber bishobora kubangamira imikorere ya spectral.

Byongeye kandi, igitutu n'imiterere ya gaze bisigaye bigira ingaruka ku kudahinduka kwa plasma no gukwirakwira kw'ingufu. Ihindagurika ry'igitutu cy'icyumba rihindura imiterere ya ionization, inzira y'ubusa, n'ingufu z'uduce, bigira ingaruka ku bucucike bwa firime, ubukana bw'ubuso, n'imiterere y'ibinyampeke. Kwanduza umuvuduko muke bishobora kugabanya ubushobozi bwo gushyiramo, mu gihe igitutu kinini cy'imyuka ishobora kwihutisha ingaruka mbi za shimi, bigatuma habaho firime zitari iza stoichiometric cyangwa kongera umuvuduko w'imbere.

Kugira ngo bigabanye izi ngaruka, sisitemu zo gusiga irangi ry’umwuka zihuza uburyo bwo gutegura icyumba neza no gukurikirana mu buryo bufatika. Gupompa irangi ry’umwuka mu buryo buhanitse cyane, harimo ipompo za turbomolecular na cryogenic, hamwe no guteka neza mu cyumba no gutunganya mbere y’uko bishyirwa mu buryo, bigabanya urugero rw’imyuka isigaye. Ibipimo by’imyuka isigaye mu mwanya wabyo (RGA) bitanga ibitekerezo bihoraho ku miterere ya gazi, bigatuma habaho kugenzura neza urujya n’uruza rw’imyuka ikora neza, ibipimo bya plasma, n’ibidukikije byo kubikamo. Ibi bipimo byemeza ko ibyuma bito bigeraho ibintu bihoraho byagenwe, ubuziranenge bw’imikorere, no kudahungabana igihe kirekire.

Muri make, imyuka isigaye ni ingenzi cyane mu kugena ubwiza bwa firime nto mu mikorere yo gutwikira ibyuma bivamo umwuka. Ingaruka zayo zishingiye ku miterere ya shimi, imiterere mito, imikorere y’urumuri, n’imiterere ya mashini. Kugenzura neza ingano y’imyuka isigaye binyuze mu ikoranabuhanga rigezweho ryo gutwikira ibyuma bivamo umwuka, gukurikirana ibikorwa, no gutegura icyumba ni ingenzi kugira ngo hagerwe ku gutwikira ibyuma bishobora kongera gukoreshwa mu nganda zitandukanye, kuva ku bice by’urumuri n’ibikoresho byo kwerekana kugeza kuri firime zirinda imikorere.

-Iyi nkuru yasohotse nauruganda rukora ibikoresho byo gusiga irangi ry'umwukaZhenhua Vacuum