Hauv cov thev naus laus zis nqus tsev, qhov muaj nyob ntawmcov pa roj seem hauv lub chamber depositiontuaj yeem cuam tshuam rau cov qauv, qhov muag, thiab cov khoom siv kho tshuab ntawm cov yeeb yaj kiab nyias. Txawm hais tias nyob rau hauv PVD, magnetron sputtering, ALD, lossis PECVD cov txheej txheem, cov roj seem - suav nrog cov dej ua pa, oxygen, nitrogen, thiab hydrocarbons - cuam tshuam nrog cov yeeb yaj kiab loj hlob thiab cov plasma ib puag ncig, cuam tshuam rau cov yeeb yaj kiab stoichiometry, qhov ceev, kev nplaum, thiab kev ua tau zoo ntawm qhov muag.
Cov dej seem uas seem yog cov khoom tsis huv tseem ceeb tshaj plaws. Hauv cov zaj duab xis oxide lossis nitride, txawm tias cov dej noo me me tuaj yeem ua rau muaj kev tswj hwm hydrolysis lossis oxidation tsis zoo ntawm qhov chaw substrate, hloov pauv stoichiometry ntawm cov txheej tso. Qhov no ua rau muaj porosity ntau ntxiv, txo qis refractive index, thiab txo qis optical transparency lossis reflectivity. Ib yam li ntawd, hydrocarbons uas tau coj los ntawm cov roj twj, phab ntsa chamber, lossis cov voj voog ua ntej tuaj yeem koom ua ke rau hauv zaj duab xis matrix, ua rau cov chaw nqus, cov chaw tawg, lossis cov qhov tsis zoo uas txo qis zaj duab xis uniformity thiab kev ua haujlwm.
Hauv cov txheej txheem reactive sputtering, cov pa oxygen lossis nitrogen seem tuaj yeem hloov pauv cov tshuaj lom neeg ntawm lub hom phiaj, ua rau lub hom phiaj lom. Qhov xwm txheej no hloov pauv cov txiaj ntsig sputter, cov yam ntxwv ntawm plasma, thiab cov nqi tso tawm, ua rau cov tuab tsis sib xws, kev hloov pauv ntawm cov khoom siv kho qhov muag, thiab cov khoom siv kho tshuab tsis zoo xws li qhov nyuaj lossis kev nplaum. Cov teebmeem no tau pom tseeb tshwj xeeb hauv cov txheej txheem ntau txheej siab, qhov twg qhov sib txawv me me hauv cov ntsuas refractive lossis kev nqus tuaj yeem cuam tshuam kev ua haujlwm spectral.
Ntxiv mus, cov roj seem thiab cov khoom sib xyaw ua rau muaj kev ruaj khov ntawm plasma thiab kev faib hluav taws xob. Kev hloov pauv ntawm lub siab hauv chav hloov pauv ionization dynamics, txoj kev dawb nruab nrab, thiab lub zog ntawm cov khoom me me, cuam tshuam rau kev sib sau ua ke ntawm zaj duab xis, qhov ntxhib ntawm qhov chaw, thiab cov qauv noob. Kev ua qias tuaj ntawm qhov siab qis yuav txo qhov ua tau zoo ntawm kev tso cov khoom, thaum qhov siab ntawm cov pa roj reactive tuaj yeem ua rau cov tshuaj tsis xav tau sai dua, tsim cov yeeb yaj kiab tsis-stoichiometric lossis ua rau muaj kev ntxhov siab sab hauv.
Yuav kom txo tau cov teebmeem no, cov txheej txheem txheej txheem nqus tsev sib xyaw ua ke kev npaj chav ua haujlwm zoo thiab kev saib xyuas lub sijhawm tiag tiag. Kev siv lub tshuab nqus tsev siab heev, suav nrog cov twj turbomolecular thiab cryogenic, ua ke nrog kev ci chav ua haujlwm kom huv si thiab kev kho ua ntej rau cov khoom siv, txo cov roj seem. Cov cuab yeej ntsuas roj seem hauv qhov chaw (RGA) muab cov lus teb tas mus li rau cov roj sib xyaw, tso cai rau kev tswj hwm qhov tseeb ntawm cov roj ntws, cov txheej txheem plasma, thiab qhov chaw tso dej. Cov kev ntsuas no ua kom ntseeg tau tias cov yeeb yaj kiab nyias ua tiav cov qauv kho qhov muag, kev ua haujlwm zoo, thiab kev ruaj khov mus sij hawm ntev.
Hauv kev xaus, cov pa roj seem yog ib qho tseem ceeb hauv kev txiav txim siab qhov zoo ntawm cov zaj duab xis nyias hauv cov txheej txheem nqus tsev. Lawv cov kev cuam tshuam suav nrog cov tshuaj lom neeg sib xyaw, microstructure, kev ua haujlwm pom, thiab cov khoom siv kho tshuab. Kev tswj hwm cov pa roj seem zoo los ntawm kev siv tshuab nqus tsev siab heev, kev saib xyuas cov txheej txheem, thiab kev npaj chav yog qhov tseem ceeb kom ua tiav cov txheej txheem rov ua dua, ua haujlwm siab thoob plaws ntau yam kev siv hauv kev lag luam, los ntawm cov khoom siv kho qhov muag thiab cov khoom siv tso saib mus rau cov yeeb yaj kiab tiv thaiv ua haujlwm.
- Tsab xov xwm no tau luam tawm los ntawmChaw tsim khoom siv nqus tsev txheejZhenhua Nqus Tsev
Lub sijhawm tshaj tawm: Lub Peb Hlis-10-2026