Kwiiteknoloji zokugquma nge-vacuum, ubukho beiigesi eziseleyo ngaphakathi kwigumbi lokubekazinokuchaphazela kakhulu izakhiwo, i-optical, kunye neempawu zoomatshini zeefilimu ezincinci. Nokuba zikwi-PVD, i-magnetron sputtering, i-ALD, okanye iinkqubo ze-PECVD, iintlobo zegesi ezisele—kuquka umphunga wamanzi, ioksijini, i-nitrogen, kunye nee-hydrocarbon—zisebenzisana nefilimu ekhulayo kunye nendawo engqongileyo yeplasma, zichaphazela i-stoichiometry yefilimu, uxinano, ukunamathela, kunye nokusebenza kwe-optical.
Umphunga wamanzi oseleyo uphakathi kwezona zinto zingcolisayo zibalulekileyo. Kwi-oxide okanye i-nitride film deposition, nokuba yi-trace amounts of moisture inokukhokelela kwi-hydrolysis engalawulekiyo okanye kwiimpendulo ze-oxidation kumphezulu we-substrate, nto leyo etshintsha i-stoichiometry ecetywayo yomaleko obekwe kuyo. Oku kuphumela ekwandeni kwe-porosity, ukuncipha kwe-refractive index, kunye nokubonakala okanye ukubonakalisa okuwohlokileyo. Ngokufanayo, ii-hydrocarbons ezivezwa kwii-oyile zepompo, iindonga zegumbi, okanye imijikelo yokucubungula yangaphambili zinokufakwa kwi-matrix yefilimu, zibangele amaziko okufunxa, iindawo zokusasazeka, okanye iziphene ezinciphisa ukufana kwefilimu kunye nokusebenza kwayo.
Kwiinkqubo zokutshiza ezisabelayo, ioksijini eseleyo okanye initrogen inokutshintsha ikhemistri yomphezulu ekujoliswe kuwo, nto leyo ekhokelela ekutyhefweni kwethagethi. Le nto itshintsha isivuno setshiza, iimpawu zeplasma, kunye nesantya sokubeka, nto leyo ebangela ukutyeba okungafaniyo, utshintsho kwii-constants ze-optical, kunye neempawu zoomatshini ezibuthathaka ezifana nobunzima okanye ukunamathela. Iziphumo zibonakala ngakumbi kwiingubo ezininzi ezichanekileyo, apho ukuphambuka okuncinci kwi-refractive index okanye ukufunxwa kunokuphazamisa ukusebenza kwe-spectral.
Ngaphezu koko, uxinzelelo lwegesi eseleyo kunye nokwakheka kwayo kuchaphazela uzinzo lweplasma kunye nokusasazwa kwamandla. Ukuguquguquka koxinzelelo lwegumbi kutshintsha amandla e-ionization, indlela ekhululekileyo ephakathi, kunye namandla eenxalenye, okuchaphazela ukuxinana kwefilimu, uburhabaxa bomphezulu, kunye nolwakhiwo lweenkozo. Ungcoliseko oluphantsi lunokunciphisa ukusebenza kakuhle kokubekwa, ngelixa uxinzelelo oluphezulu lwenxalenye yeegesi ezisebenzayo lunokukhawulezisa iimpendulo zeekhemikhali ezingafunekiyo, ukuvelisa iifilimu ezingezizo eze-stoichiometric okanye ukwandisa uxinzelelo lwangaphakathi.
Ukunciphisa ezi ziphumo, iinkqubo zokugquma i-vacuum zidibanisa ukulungiswa kwegumbi okungqongqo kunye nokubeka esweni ngexesha langempela. Ukumpompa i-vacuum ephezulu kakhulu, kuquka iipompo ze-turbomolecular kunye ne-cryogenic, kunye nokubhaka okucokisekileyo kwegumbi kunye nonyango lwangaphambi kwe-substrate, kunciphisa amanqanaba egesi eseleyo. Ii-analyzer zegesi ezisele zihleli (i-RGA) zibonelela ngempendulo eqhubekayo malunga nokwakheka kwegesi, zivumela ulawulo oluchanekileyo lokuhamba kwegesi esebenzayo, iiparameter zeplasma, kunye nendawo yokubeka. La manyathelo aqinisekisa ukuba iifilimu ezincinci zifezekisa ii-optical constants eziyilwe, ukuthembeka koomatshini, kunye nokuzinza kwexesha elide.
Ngamafutshane, iigesi ezisele zibalulekile ekumiseleni umgangatho wefilimu encinci kwiinkqubo zokugquma nge-vacuum. Impembelelo yazo ibandakanya ukwakheka kweekhemikhali, isakhiwo se-microstructure, ukusebenza kwe-optical, kunye neempawu zoomatshini. Ulawulo olusebenzayo lomxholo wegesi eseleyo ngokusebenzisa ubuchwepheshe obuphambili be-vacuum, ukujonga inkqubo, kunye nokulungiswa kwegumbi kubalulekile ukuze kufezekiswe ukugquma okuphindaphindwayo nokusebenza okuphezulu kuzo zonke izicelo zoshishino, ukusuka kwizinto ezibonakalayo kunye nezixhobo zokubonisa ukuya kwiifilimu zokukhusela ezisebenzayo.
-Eli nqaku lipapashwe nguumenzi wezixhobo zokugquma nge-vacuumI-Zhenhua Vacuum
Ixesha lokuthumela: Matshi-10-2026