Mmene Mpweya Wotsalira Umakhudzira Kapangidwe ka Filimu Yopyapyala mu Njira Zophikira Vacuum

Mu ukadaulo wopaka vacuum, kupezeka kwampweya wotsalira mkati mwa chipinda chosungiramo zinthuzingakhudze kwambiri kapangidwe ka filimu yopyapyala, kuwala, ndi makina. Kaya mu PVD, magnetron sputtering, ALD, kapena PECVD processes, mitundu ya mpweya wotsalira—kuphatikizapo nthunzi ya madzi, mpweya, nayitrogeni, ndi ma hydrocarbon—imalumikizana ndi filimu yomwe ikukula komanso malo a plasma, zomwe zimakhudza stoichiometry ya filimu, kuchulukana, kugwirizana, ndi magwiridwe antchito a kuwala.

Nthunzi yamadzi yotsalira ndi imodzi mwa zinthu zofunika kwambiri zoipitsa. Mu oxide kapena nitride film deposition, ngakhale kuchuluka kwa chinyezi kungayambitse hydrolysis yosalamulirika kapena ma oxidation reactions pamwamba pa substrate, zomwe zimasintha stoichiometry yomwe ikufuna ya gawo losungidwa. Izi zimapangitsa kuti pakhale kuchuluka kwa porosity, kuchepa kwa refractive index, komanso kuwonongeka kwa kuwala kapena reflectivity. Mofananamo, ma hydrocarbon omwe amayambitsidwa kuchokera ku mafuta a pampu, makoma a chipinda, kapena machitidwe akale opangira akhoza kulowetsedwa mu filimu, zomwe zimayambitsa malo oyamwa, malo obalalitsira, kapena zolakwika zomwe zimachepetsa kufanana kwa filimu ndi magwiridwe antchito.

Mu njira zotulutsira mpweya, mpweya wotsalira kapena nayitrogeni ukhoza kusintha kapangidwe kake ka pamwamba pa chinthucho, zomwe zimapangitsa kuti pakhale poizoni. Izi zimasintha kuchuluka kwa mpweya wotulutsira mpweya, makhalidwe a plasma, ndi kuchuluka kwa mpweya wotuluka, zomwe zimapangitsa kuti makulidwe ake asafanane, kusintha kwa zinthu zokhazikika, komanso zinthu zina zomwe zimawonongeka monga kuuma kapena kumamatira. Zotsatira zake zimaonekera kwambiri mu zokutira za multilayer zolondola kwambiri, pomwe kupotoka pang'ono mu refractive index kapena absorption kumatha kusokoneza magwiridwe antchito a spectral.

Kuphatikiza apo, kuthamanga kwa mpweya wotsalira ndi kapangidwe kake zimakhudza kukhazikika kwa plasma ndi kugawa kwa mphamvu. Kusinthasintha kwa kuthamanga kwa mpweya m'chipinda kumasintha mphamvu ya ionization, njira yapakati yomasuka, ndi mphamvu ya tinthu tating'onoting'ono, zomwe zimakhudza kuchuluka kwa filimu, kukhwima kwa pamwamba, ndi kapangidwe ka tirigu. Kuipitsidwa kotsika kungachepetse magwiridwe antchito oyika, pomwe kupanikizika kwakukulu kwa mpweya wobwerezabwereza kumatha kufulumizitsa machitidwe osafunikira a mankhwala, kupanga mafilimu osakhala a stoichiometric kapena kuwonjezera kupsinjika kwamkati.

Kuti achepetse zotsatirazi, makina opaka vacuum amaphatikiza kukonzekera kwamphamvu kwa chipinda ndi kuwunika nthawi yeniyeni. Kupompa vacuum kokwera kwambiri, kuphatikiza mapampu a turbomolecular ndi cryogenic, kuphatikiza ndi kuphika bwino chipinda ndi substrate pre-treatment, kumachepetsa kuchuluka kwa mpweya wotsalira. Zowunikira mpweya wotsalira mkati mwa malo (RGA) zimapereka mayankho mosalekeza pa kapangidwe ka mpweya, zomwe zimathandiza kuwongolera molondola kayendedwe ka mpweya woyankha, magawo a plasma, ndi malo osungira. Njirazi zimatsimikizira kuti mafilimu opyapyala amakwaniritsa zokhazikika zowoneka bwino, umphumphu wa makina, komanso kukhazikika kwa nthawi yayitali.

Mwachidule, mpweya wotsalira ndi chinthu chofunikira kwambiri pakudziwa mtundu wa filimu yopyapyala mu njira zophikira vacuum. Mphamvu yake imakhudza kapangidwe ka mankhwala, kapangidwe kake kakang'ono, magwiridwe antchito a kuwala, ndi mawonekedwe a makina. Kuwongolera bwino kuchuluka kwa mpweya wotsalira kudzera muukadaulo wapamwamba wa vacuum, kuyang'anira njira, ndi kukonzekera chipinda ndikofunikira kuti mupeze zophikira zomwe zingagwiritsidwenso ntchito bwino m'mafakitale osiyanasiyana, kuyambira pazinthu zowunikira ndi zida zowonetsera mpaka makanema oteteza ogwira ntchito.

-Nkhaniyi yasindikizidwa ndiwopanga zida zophikira vacuumZhenhua Vacuum