I roto i ngā hangarau paninga korehau, te aroaro ongā hau toenga i roto i te rūma whakatakotorangaka taea e ia te awe nui i ngā āhuatanga hanganga, whatu, me te hangarau o ngā kiriata angiangi. Ahakoa i roto i ngā tukanga PVD, magnetron sputtering, ALD, PECVD rānei, ka taunekeneke ngā momo hau toenga—tae atu ki te mamaoa wai, te hāora, te hauota, me ngā warowaihā—ki te kiriata e tipu ana me te taiao plasma, ka pā ki te stoichiometry kiriata, te kiato, te piri, me te mahi whatu.
Ko te kohu wai toenga kei roto i ngā poke tino nui. I roto i te whakatakotoranga kiriata waikura, nitride rānei, ahakoa he iti noa te makuku ka arahi pea ki te waikura kore whakahaere, ki ngā tauhohenga waikura rānei i te mata o te papa, ka whakarerekē i te stoichiometry e hiahiatia ana o te paparanga kua whakatakotoranga. Ka hua ake tēnei i te pikinga o te porosity, te hekenga o te taupū whakaata, me te hekenga o te māramatanga whatu, te whakaata rānei. Waihoki, ko ngā warowaihā i whakaurua mai i ngā hinu papu, i ngā pakitara rūma, i ngā huringa tukatuka o mua rānei ka taea te whakauru ki roto i te anga kiriata, ka puta he pokapū mimiti, he pae marara, he hapa rānei e whakaiti ana i te ōritetanga o te kiriata me te mahi mahi.
I roto i ngā tukanga pupuhi tauhohe, ka taea e te hāora, te hauota rānei e toe ana te whakarerekē i te matū o te mata o te ūnga, ka arahi ki te paihana ūnga. Ka whakarerekē tēnei āhuatanga i te hua pupuhi, ngā āhuatanga o te plasma, me te tere whakatakotoranga, ka hua ake he matotoru kore-taurite, he rerekētanga o ngā pūmau whatu, me ngā āhuatanga miihini ngoikore pēnei i te pakeke, te piri rānei. Ka tino kitea ngā pānga i roto i ngā paninga paparanga maha-tino tika, i reira ka taea e ngā rerekētanga iti o te taupū whakaata, te mimiti rānei te whakararuraru i te mahi tirohanga.
Heoi anō, ka pā te pēhanga me te hanganga o te hau toenga ki te pumau o te parāoa me te tohatoha pūngao. Ka whakarerekētia e ngā piki me ngā heke o te pēhanga rūma ngā whanaketanga ionization, te ara kore utu toharite, me te pūngao matūriki, ka pā ki te whakakīkī kiriata, te taratara o te mata, me te hanganga witi. Ka whakaitihia pea e te poke iti-pēhanga te whai huatanga o te whakatakotoranga, engari ka taea e ngā pēhanga wāhanga teitei o ngā hau tauhohe te whakatere i ngā tauhohenga matū kāore e hiahiatia, ka puta he kiriata kore-stoichiometric, ka piki ake rānei te ahotea o roto.
Hei whakaiti i ēnei pānga, ka whakauruhia e ngā pūnaha paninga korehau te whakarite pakari o te rūma me te aroturukitanga wā-tūturu. Ko te papu korehau tino-teitei, tae atu ki ngā papu turbomolecular me te cryogenic, me te tunu pai o te rūma me te maimoatanga-mua o te papa, ka whakaiti i ngā taumata hau toenga. Ka whakaratohia e ngā tātari hau toenga-tūnga (RGA) he urupare tonu ki te hanganga hau, ka taea ai te whakahaere tika i te rere o te hau tauhohe, ngā tawhā plasma, me te taiao whakatakotoranga. Mā ēnei mehua ka tutuki i ngā kiriata angiangi ngā pūmau whatu kua hoahoatia, te pono o te miihini, me te pumau mō te wā roa.
Hei whakarāpopototanga, he mea nui ngā hau toenga ki te whakatau i te kounga o te kiriata angiangi i roto i ngā tukanga paninga korehau. Ko tō rātou awe e kapi ana i te hanganga matū, te hanganga moroiti, te mahi whatu, me ngā āhuatanga miihini. He mea nui te whakahaere tika i te ihirangi hau toenga mā te hangarau korehau matatau, te aroturuki tukanga, me te whakarite rūma hei whakatutuki i ngā paninga mahi-teitei ka taea te tāruarua puta noa i ngā tono ahumahi rerekē, mai i ngā wāhanga whatu me ngā taputapu whakaatu ki ngā kiriata tiaki mahi.
-Nākaihanga taputapu paninga korehauZhenhua Vacuum
Wā tuku: Maehe-10-2026