Iningi lezakhi zamakhemikhali lingashiswa ngokuzihlanganisa namaqembu amakhemikhali, isib. i-Si isabela ne-H ukuze yakhe i-SiH4, kanti i-Al ihlangana ne-CH3 ukuze yakhe i-Al(CH3). Enqubweni ye-CVD yokushisa, amagesi angenhla amunca inani elithile lamandla okushisa njengoba edlula ku-substrate eshisayo futhi akha amaqembu asabelayo, njenge-CH3 kanye ne-AL(CH3)2, njll. Bese ehlangana ukuze akhe amaqembu asabelayo, abese ebekwa ku-substrate. Ngemva kwalokho, ahlangana futhi abekwa njengamafilimu amancane. Endabeni ye-PECVD, ukushayisana kwama-electron, izinhlayiya zamandla kanye nama-molecule esigaba segesi ku-plasma kunikeza amandla okusebenza adingekayo ukwakha la maqembu amakhemikhali asabelayo.
Izinzuzo ze-PECVD zitholakala kakhulu kulezi zici ezilandelayo:
(1) Izinga lokushisa eliphansi lenqubo uma liqhathaniswa nokufakwa komhwamuko wamakhemikhali okuvamile, okubangelwa kakhulu ukusebenza kwe-plasma kwezinhlayiya ezisebenzayo esikhundleni sokusebenza kokushisa okuvamile;
(2) Kufana ne-CVD evamile, ukugoqa okuhle kwesendlalelo sefilimu;
(3) Ukwakheka kwesendlalelo sefilimu kungalawulwa ngokunganaki ngezinga elikhulu, okwenza kube lula ukuthola amafilimu anezingqimba eziningi;
(4) Ukucindezeleka kwefilimu kungalawulwa ubuchwepheshe bokuxuba imvamisa ephezulu/ephansi.
–Lesi sihloko sikhishwe yi-umenzi womshini wokumboza nge-vacuumI-Guangdong Zhenhua
Isikhathi sokuthunyelwe: Ephreli-18-2024