Mokuna 2 o ka Hoʻokahe ʻana o ka Vapor Chemical i Hoʻonui ʻia ma ka Plasma

Hiki ke hoʻoheheʻe ʻia ka hapa nui o nā mea kemika ma ka hoʻohui ʻana iā lākou me nā hui kemika, e laʻa, hana ʻo Si me H e hana iā SiH4, a hui pū ʻo Al me CH3 e hana iā Al(CH3). I ke kaʻina hana CVD wela, omo nā kinoea i luna i kahi nui o ka ikehu wela i ko lākou hele ʻana ma o ka substrate wela a hana i nā hui reactive, e like me CH3 a me AL(CH3)2, etc. A laila hui pū lākou me kekahi i kekahi e hana i nā hui reactive, a laila waiho ʻia ma luna o ka substrate. Ma hope iho, hui pū lākou me kekahi i kekahi a waiho ʻia ma ke ʻano he mau ʻili lahilahi. I ke ʻano o PECVD, ʻo ke kuʻi ʻana o nā electrons, nā ʻāpana ikaika a me nā molekala gas-phase i loko o ka plasma e hāʻawi i ka ikehu hoʻāla e pono ai e hana i kēia mau hui kemika reactive.

ʻO nā pōmaikaʻi o PECVD ma nā ʻano penei:

(1) Haʻahaʻa ka mahana o ke kaʻina hana i hoʻohālikelike ʻia me ka waiho ʻana o ka mahu kemika maʻamau, ʻo ia hoʻi ma muli o ka hoʻoulu ʻana o ka plasma o nā ʻāpana reactive ma kahi o ka hoʻoulu ʻana i ka hoʻomehana maʻamau;

(2) E like me ke CVD maʻamau, ka uhi ʻana a puni o ka papa kiʻiʻoniʻoni;

(3) Hiki ke hoʻomalu ʻia ke ʻano o ka papa kiʻiʻoniʻoni me ka manaʻo ʻole i kahi nui, e maʻalahi ai ka loaʻa ʻana o nā kiʻiʻoniʻoni multilayer;

(4) Hiki ke hoʻomalu ʻia ke kaumaha o ke kiʻiʻoniʻoni e ka ʻenehana hoʻohuihui alapine kiʻekiʻe/haʻahaʻa.

–Ua hoʻokuʻu ʻia kēia ʻatikala emea hana mīkini uhi hakahakaGuangdong Zhenhua