Babi na 2 na Ingantaccen Tsarin Tururin Sinadaran da ke Cikin Plasma

Yawancin abubuwan sinadarai ana iya tururi su ta hanyar haɗa su da ƙungiyoyin sinadarai, misali Si yana amsawa da H don samar da SiH4, kuma Al yana haɗuwa da CH3 don samar da Al(CH3). A cikin tsarin CVD na zafi, iskar gas ɗin da ke sama suna shan wani adadin kuzarin zafi yayin da suke ratsawa ta cikin substrate mai zafi kuma suna samar da ƙungiyoyin amsawa, kamar CH3 da AL(CH3)2, da sauransu. Sannan suna haɗuwa da juna don samar da ƙungiyoyin amsawa, waɗanda daga baya ake ajiye su a kan substrate. Daga baya, suna haɗuwa da juna kuma ana ajiye su azaman siririn fim. A yanayin PECVD, karo na electrons, barbashi masu kuzari da ƙwayoyin iskar gas a cikin plasma suna ba da kuzarin kunnawa da ake buƙata don samar da waɗannan ƙungiyoyin sinadarai masu amsawa.

Fa'idodin PECVD galibi suna cikin waɗannan fannoni:

(1) Ƙananan zafin aiki idan aka kwatanta da ajiyar tururin sinadarai na gargajiya, wanda galibi ya faru ne saboda kunna ƙwayoyin amsawa a cikin jini maimakon kunna dumama na gargajiya;

(2) Kamar CVD na al'ada, kyakkyawan shimfidar shimfidar shimfidar fim ɗin;

(3) Ana iya sarrafa tsarin fim ɗin ba tare da wani tsari ba, wanda hakan ke sauƙaƙa samun fina-finai masu launuka da yawa;

(4) Ana iya sarrafa damuwar fim ta hanyar fasahar haɗa mita mai yawa/ƙasa.

– An fitar da wannan labarin ne dagainjin shafa injin injinGuangdong Zhenhua