Kuyika Mpweya wa Madzi Owonjezera a Plasma Chaputala 2

Zinthu zambiri za mankhwala zimatha kusinthidwa kukhala nthunzi poziphatikiza ndi magulu a mankhwala, mwachitsanzo Si imagwirizana ndi H kuti ipange SiH4, ndipo Al imagwirizana ndi CH3 kuti ipange Al(CH3). Mu njira ya CVD yotentha, mpweya womwe uli pamwambapa umatenga mphamvu inayake ya kutentha pamene ukudutsa mu substrate yotentha ndikupanga magulu osinthika, monga CH3 ndi AL(CH3)2, ndi zina zotero. Kenako zimasakanikirana kuti zipange magulu osinthika, omwe kenako amaikidwa pa substrate. Pambuyo pake, zimasakanikirana ndipo zimayikidwa ngati mafilimu opyapyala. Pankhani ya PECVD, kugundana kwa ma elekitironi, tinthu tamphamvu ndi mamolekyu a gasi mu plasma kumapereka mphamvu yoyambitsa yomwe ikufunika kuti ipange magulu a mankhwala osinthika awa.

Ubwino wa PECVD uli makamaka m'mbali zotsatirazi:

(1) Kutentha kochepa poyerekeza ndi kuyika kwa nthunzi ya mankhwala wamba, komwe kumachitika makamaka chifukwa cha kuyatsa kwa tinthu tomwe timachita zinthu m'malo mwa kuyatsa kwa kutentha kwachizolowezi;

(2) Mofanana ndi CVD yachikhalidwe, kukulunga bwino kwa filimu;

(3) Kapangidwe ka filimuyi kangathe kulamulidwa mwachisawawa kwambiri, zomwe zimapangitsa kuti zikhale zosavuta kupeza mafilimu ambiri;

(4) Kupsinjika kwa filimu kumatha kulamulidwa ndi ukadaulo wosakaniza pafupipafupi/pang'ono.

– Nkhaniyi yatulutsidwa ndiwopanga makina ophikira vacuumGuangdong Zhenhua