Ka taea te mimiti i te nuinga o ngā huānga matū mā te whakakotahi i a rātou me ngā rōpū matū, hei tauira, ka tauhohe a Si ki a H hei hanga SiH4, ā, ka hono a Al ki a CH3 hei hanga Al(CH3). I roto i te tukanga CVD wera, ka mimitihia e ngā hau o runga ake nei tētahi nui o te pūngao wera i a rātou e haere ana i roto i te papa wera, ka hanga i ngā rōpū tauhohe, pērā i a CH3 me AL(CH3)2, me ētahi atu. Kātahi ka honoa rātou ki a rātou anō hei hanga i ngā rōpū tauhohe, ka whakatakotoria ki runga i te papa. Muri iho, ka honoa rātou ki a rātou anō, ā, ka whakatakotoria hei kiriata angiangi. Mō te PECVD, ko te tukinga o ngā irahiko, ngā matūriki hihiko me ngā ngota hau-āhuatanga i roto i te parāuma ka whakarato i te pūngao whakahohe e hiahiatia ana hei hanga i ēnei rōpū matū tauhohe.
Ko ngā painga matua o te PECVD kei roto i ēnei āhuatanga e whai ake nei:
(1) He iti ake te pāmahana o te tukanga ki te whakataurite ki te whakatakotoranga kohu matū tuku iho, ko te take nui ko te whakahohenga plasma o ngā matūriki tauhohe, kaua ki te whakahohenga whakamahana tuku iho;
(2) Pērā i te CVD tuku iho, he pai te whakakikoruatanga o te paparanga kiriata;
(3) Ka taea te whakahaere i te hanganga o te paparanga kiriata i runga i te āhua noa, kia māmā ai te tiki kiriata paparanga maha;
(4) Ka taea te whakahaere i te ahotea kiriata mā te hangarau whakaranu auau teitei/iti.
–Nā tekaihanga mīhini paninga korehauGuangdong Zhenhua
Wā tuku: 18 Paenga-whāwhā 2024