Igice cya 2 cyo Gushyiramo Umwotsi w'Imyuka mu Mazi

Ibintu byinshi bya shimi bishobora guhindurwa umwuka binyuze mu kubivanga n'amatsinda ya shimi, urugero: Si ihuza na H igakora SiH4, na Al ihuza na CH3 igakora Al (CH3). Mu buryo bwa CVD y'ubushyuhe, imyuka yavuzwe haruguru ifata ingufu runaka z'ubushyuhe uko inyura muri substrate ishyushye igakora amatsinda ya shimi, nka CH3 na AL (CH3)2, nibindi. Hanyuma bihurira hamwe kugira ngo bikore amatsinda ya shimi, hanyuma ashyirwa kuri substrate. Nyuma yaho, bihurira hamwe kandi bigashyirwa nk'udupira duto. Ku birebana na PECVD, guhurirana kwa electron, uduce tw'ingufu na molecules za gaze muri plasma bitanga ingufu zikenewe kugira ngo habeho aya matsinda ya shimi ya shimi.

Ibyiza bya PECVD biri ahanini muri ibi bikurikira:

(1) Ubushyuhe buri hasi ugereranije n'uburyo busanzwe bwo gushyira umwuka mu kirere, ahanini biterwa no gukoresha plasma mu bice by'umubiri aho gukoresha uburyo busanzwe bwo gushyushya;

(2) Kimwe na CVD isanzwe, gupfunyika neza kw'urwego rwa firime;

(3) Imiterere y'urwego rwa filime ishobora kugenzurwa ku buryo butunguranye ku rugero runini, bigatuma byoroha kubona filime z'urwego rwinshi;

(4) Umuvuduko wa firime ushobora kugenzurwa hakoreshejwe ikoranabuhanga ryo kuvanga inshuro nyinshi/hasi.

–Iyi nkuru yasohotse nauruganda rukora imashini zikora imashini zikoresha umwuka ushyushyeGuangdong Zhenhua