Cutubka 2aad ee Kaydinta Uumiga Kiimikada ee Balaasmaha lagu Kordhiyay

Inta badan curiyayaasha kiimikada waxaa lagu uumi saari karaa iyadoo lagu daro kooxaha kiimikada, tusaale ahaan Si waxay la falgashaa H si ay u samayso SiH4, Al-na waxay la falgashaa CH3 si ay u samayso Al(CH3). Habka CVD ee kuleylka, gaasaska kor ku xusan waxay nuugaan xaddi gaar ah oo tamar kuleyl ah marka ay dhex maraan substrate-ka kulul waxayna sameeyaan kooxo falgal ah, sida CH3 iyo AL(CH3)2, iwm. Kadib way isku daraan si ay u sameeyaan kooxo falgal ah, kuwaas oo markaa lagu shubo substrate-ka. Kadib, way isku daraan oo waxaa lagu shubaa filimaan khafiif ah. Xaaladda PECVD, isku dhaca elektaroonada, walxaha firfircoon iyo molecules-ka marxaladda gaaska ee plasma-ga waxay bixiyaan tamarta firfircoonida ee loo baahan yahay si loo sameeyo kooxahan kiimikada falgalka ah.

Faa'iidooyinka PECVD waxay inta badan ku jiraan dhinacyada soo socda:

(1) Heerkulka habka oo hooseeya marka loo eego kaydka uumiga kiimikada ee caadiga ah, taas oo inta badan sabab u ah kicinta balaasmaha ee walxaha fal-celinta halkii laga isticmaali lahaa kicinta kuleylka caadiga ah;

(2) Sida CVD-ga caadiga ah, dahaarka wanaagsan ee lakabka filimka;

(3) Halabuurka lakabka filimka si aan kala sooc lahayn ayaa loo xakamayn karaa si ballaaran, taasoo sahlaysa in la helo filimaan badan oo lakab ah;

(4) Cadaadiska filimka waxaa lagu xakamayn karaa tiknoolajiyada isku-darka soo noqnoqoshada sare/hoose.

– Maqaalkan waxaa soo saaray ’’Qoraalkan waxaa soo saaray ’’soo saaraha mashiinka dahaadhka faakuumkaGuangdong Zhenhua