Izakhi zamakhemikhali eziningi zingahwamuka ngokuzihlanganisa namaqembu amakhemikhali, isb. I-Si isabela no-H ukuze kwakhe i-SiH4, futhi i-Al ihlangana ne-CH3 yakhe i-Al(CH3). Enqubweni ye-CVD eshisayo, amagesi angenhla amunca inani elithile lamandla ashisayo njengoba edlula ku-substrate eshisayo futhi akhe amaqembu asebenzayo, njenge-CH3 ne-AL(CH3)2, njll. Abe esehlangana ukuze akhe amaqembu asebenzayo, abese efakwa ku-substrate. Kamuva, zihlangana zodwa futhi zifakwe njengamafilimu amancane. Endabeni ye-PECVD, ukungqubuzana kwama-electron, izinhlayiya ezinamandla kanye nama-molecule esigaba segesi ku-plasma kunikeza amandla okusebenza adingekayo ukuze akhe la maqembu amakhemikhali asebenzayo.
Izinzuzo ze-PECVD ikakhulukazi kulezi zici ezilandelayo:
(1) Ukushisa kwenqubo ephansi uma kuqhathaniswa nokufakwa komhwamuko wamakhemikhali wamakhemikhali, okubangelwa ikakhulukazi ukwenziwa kusebenze kwe-plasma kwezinhlayiya ezisebenzayo esikhundleni sokusebenza kokushisa okuvamile;
(2) Ngokufana ne-CVD evamile, ukugoqa okuhle kongqimba lwefilimu;
(3) Ukwakheka kongqimba lwefilimu kungalawulwa ngokungafanele ngezinga elikhulu, okwenza kube lula ukuthola amafilimu anezingqimba eziningi;
(4) Ukucindezeleka kwefilimu kungalawulwa ubuchwepheshe bokuxuba imvamisa ephezulu / ephansi.
-Le ndatshana ikhishwe nguumenzi womshini we-vacuum coatingI-Guangdong Zhenhua
Isikhathi sokuthumela: Apr-18-2024