I-coefficient yokushisa yokumelana nefilimu yensimbi iyahlukahluka ngogqinsi lwefilimu, amafilimu amancane anegethivu, amafilimu awugqinsi alungile, futhi amafilimu aminyene ayafana kodwa awafani nezinto eziningi. Ngokuvamile, izinga lokushisa lokumelana lokumelana liyashintsha lisuka kokubi liye kokuhle njengoba ubukhulu befilimu bukhula bufinyelele amashumi ama-nanometer.
Ngaphezu kwalokho, izinga lokuhwamuka liphinde lithinte izinga lokushisa eliphikisanayo lamafilimu ensimbi. Izinga lokuhwamuka eliphansi elilungiselelwe ungqimba lwefilimu liyaxega, ama-electron kuwo wonke umgoqo wawo ongase ube khona kanye nekhono lokukhiqiza i-conductivity abuthakathaka, kuhambisana ne-oxidation kanye ne-adsorption, ngakho-ke inani lokumelana liphezulu, i-coefficient yokumelana nezinga lokushisa lincane, noma libi, ngokwenyuka kwezinga lokuhwamuka, izinga lokushisa lokumelana lokumelana noshintsho oluncane lusuka kokulukhulu, lusuka kokubi ukuya kokuhle. Lokhu kungenxa yezinga eliphansi lokuhwamuka kwefilimu elilungiselelwe ngenxa ye-oxidation yezakhiwo ze-semiconductor, i-coefficient yokushisa yokumelana yamanani amabi. Amafilimu alungiselelwe ngezinga eliphezulu lokuhwamuka avame ukuba nezakhiwo zensimbi futhi abe ne-coefficient yokushisa yokumelana ne-positive.
Njengoba ukwakheka kwefilimu kushintsha ngendlela engenakuhlehliswa ngezinga lokushisa, izinga lokushisa lokumelana nokumelana nefilimu libuye lishintshe nezinga lokushisa lesendlalelo sokumboza ngesikhathi sokuhwamuka, futhi ifilimu iba mncane, ishintsha kakhulu. Lokhu kungacatshangwa njengomphumela wezinguquko zamakhemikhali ezibangelwa ukuhwamuka kabusha nokusabalalisa kabusha kwezinhlayiya zesiqhingi esiseduze noma ifilimu yesakhiwo se-tubular ku-substrate, kanye nokuhlakazeka kwe-lattice, ukuhlakazeka kokungcola, ukuhlakazeka kokukhubazeka kwe-lattice, kanye ne-oxidation.
-Le ndatshana ikhishwe nguumshini wokugcwalisa umshini we-vacuumr Guangdong Zhenhua
Isikhathi sokuthumela: Jan-18-2024

